Issued Patents All Time
Showing 151–151 of 151 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6228278 | Methods and apparatus for determining an etch endpoint in a plasma processing system | Jaroslaw W. Winniczek, M. J. Francois Chandrasekar Dassapa, Mark Wiepking | 2001-05-08 |