Issued Patents All Time
Showing 101–125 of 151 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8276649 | Process to cast seal slots in turbine vane shrouds | Ronald R. Gagnon, Jr., John R. Farris | 2012-10-02 |
| 8251126 | Refractory metal core assembly | Ronald R. Gagnon, Jr., John R. Farris | 2012-08-28 |
| 8236188 | Method for low-K dielectric etch with reduced damage | Bing Ji, Kenji Takeshita, Andrew D. Bailey, III, Maryam Moravej, Stephen M. Sirard +6 more | 2012-08-07 |
| 8222155 | Selectivity control in a plasma processing system | Kenji Takeshita, Odette Turmel, Felix Kozakevich | 2012-07-17 |
| 8222157 | Hybrid RF capacitively and inductively coupled plasma source using multifrequency RF powers and methods of use thereof | Alexei Marakhtanov, Rajinder Dhindsa, Andreas Fischer | 2012-07-17 |
| 8158017 | Detection of arcing events in wafer plasma processing through monitoring of trace gas concentrations | — | 2012-04-17 |
| 8154209 | Modulated multi-frequency processing method | Alexei Marakhtanov, Rajhinder Dhindsa, Andrew D. Bailey, III | 2012-04-10 |
| 8105033 | Particle resistant in-wall cooling passage inlet | — | 2012-01-31 |
| 8105019 | 3D contoured vane endwall for variable area turbine vane arrangement | Michael G. McCaffrey, James D. Hill, Shankar S. Magge, Joel H. Wagner | 2012-01-31 |
| 8007229 | Variable area turbine vane arrangement | Michael G. McCaffrey, John R. Farris, George T. Suljak | 2011-08-30 |
| 7994794 | Methods for measuring a set of electrical characteristics in a plasma | Christopher Kimball, Douglas Keil, Alexei Marakhtanov | 2011-08-09 |
| 7967555 | Process to cast seal slots in turbine vane shrouds | Ronald R. Gagnon, Jr., John R. Farris | 2011-06-28 |
| 7892445 | Wafer electrical discharge control using argon free dechucking gas | David Wei, Howard Dang, Masahiro Watanabe, Sean S. Kang, Kenji Takeshita +2 more | 2011-02-22 |
| 7879184 | Apparatuses, systems and methods for rapid cleaning of plasma confinement rings with minimal erosion of other chamber parts | Andreas Fischer | 2011-02-01 |
| 7867355 | Adjustable height PIF probe | Christopher Kimball, Douglas Keil, Alexei Marakhtanov | 2011-01-11 |
| 7851368 | Methods and apparatus for igniting a low pressure plasma | Alexei Marakhtanov | 2010-12-14 |
| 7837826 | Hybrid RF capacitively and inductively coupled plasma source using multifrequency RF powers and methods of use thereof | Alexei Marakhtanov, Rajinder Dhindsa, Andreas Fischer | 2010-11-23 |
| 7838086 | Magnetic enhancement for mechanical confinement of plasma | Douglas Keil, Lumin Li, Reza Sadjadi, Eric H. Lenz, Rajinder Dhindsa +1 more | 2010-11-23 |
| 7829468 | Method and apparatus to detect fault conditions of plasma processing reactor | Douglas Keil, Chris Kimball, Andreas Fischer | 2010-11-09 |
| 7753104 | Investment casting cores and methods | Blake J. Luczak, James T. Beals, Eric L. Couch | 2010-07-13 |
| 7749353 | High aspect ratio etch using modulation of RF powers of various frequencies | Camelia Rusu, Rajinder Dhindsa, Mukund Srinivasan, Lumin Li, Felix Kozakevich | 2010-07-06 |
| 7723994 | Plasma processing chamber with an apparatus for measuring a set of electrical characteristics in a plasma | Christopher Kimball, Douglas Keil, Alexei Marakhtanov | 2010-05-25 |
| 7682516 | Vertical profile fixing | S. M. Reza Sadjadi, Peter Cirigliano, Jisoo Kim, Zhisong Huang | 2010-03-23 |
| 7645707 | Etch profile control | Camelia Rusu, Zhisong Huang, Mukund Srinivasan, Aaron Eppler | 2010-01-12 |
| 7578301 | Methods and apparatus for determining the endpoint of a cleaning or conditioning process in a plasma processing system | Douglas Keil, Alexei Marakhtanov | 2009-08-25 |