Issued Patents All Time
Showing 76–100 of 151 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9190289 | System, method and apparatus for plasma etch having independent control of ion generation and dissociation of process gas | — | 2015-11-17 |
| 9177762 | System, method and apparatus of a wedge-shaped parallel plate plasma reactor for substrate processing | — | 2015-11-03 |
| 9133726 | Seal for gas turbine engine component | Michael G. McCaffrey | 2015-09-15 |
| 9117767 | Negative ion control for dielectric etch | Alexei Marakhatanov, Mirzafer Abatchev, Rajinder Dhindsa, Andrew D. Bailey, III | 2015-08-25 |
| 9111724 | Apparatus and method for controlling plasma potential | Douglas Keil, Lumin Li, Reza Sadjadi, Eric H. Lenz, Rajinder Dhindsa | 2015-08-18 |
| 9105700 | Method for forming self-aligned contacts/vias with high corner selectivity | Ananth Indrakanti, Peng Wang | 2015-08-11 |
| 9039911 | Plasma-enhanced etching in an augmented plasma processing system | Andrew D. Bailey, III, Rajinder Dhindsa | 2015-05-26 |
| 8956461 | Apparatuses, systems and methods for rapid cleaning of plasma confinement rings with minimal erosion of other chamber parts | Andreas Fischer | 2015-02-17 |
| 8932429 | Electronic knob for tuning radial etch non-uniformity at VHF frequencies | Zhigang Chen | 2015-01-13 |
| 8920113 | Thermal gradiant tolerant turbomachine coupling member | — | 2014-12-30 |
| 8869741 | Methods and apparatus for dual confinement and ultra-high pressure in an adjustable gap plasma chamber | Andreas Fischer | 2014-10-28 |
| 8790067 | Blade clearance control using high-CTE and low-CTE ring members | Michael G. McCaffrey | 2014-07-29 |
| 8708652 | Cover plate for turbine rotor having enclosed pump for cooling air | Joseph T. Caprario | 2014-04-29 |
| 8677590 | Plasma confinement structures in plasma processing systems and methods thereof | Andreas Fischer | 2014-03-25 |
| 8652298 | Triode reactor design with multiple radiofrequency powers | Rajinder Dhindsa, Alexei Marakhtanov, Gerardo Delgadino, Bi-Ming Yen, Andrew D. Bailey, III | 2014-02-18 |
| 8635971 | Tunable uniformity in a plasma processing system | — | 2014-01-28 |
| 8540844 | Plasma confinement structures in plasma processing systems | Andreas Fischer | 2013-09-24 |
| 8518209 | Apparatus for determining the endpoint of a cleaning or conditioning process in a plasma processing system | Douglas Keil, Alexei Marakhtanov | 2013-08-27 |
| 8470126 | Wiggling control for pseudo-hardmask | Ben-Li Sheu, Rajinder Dhindsa, Vinay Pohray, Andrew D. Bailey, III | 2013-06-25 |
| 8450635 | Method and apparatus for inducing DC voltage on wafer-facing electrode | Rajinder Dhindsa, Alexei Marakhtanov, Andreas Fischer | 2013-05-28 |
| 8439639 | Filter system for blade outer air seal | Christopher R. Joe, Keith A. Santeler | 2013-05-14 |
| 8408874 | Platformless turbine blade | Michael G. McCaffrey | 2013-04-02 |
| 8357434 | Apparatus for the deposition of a conformal film on a substrate and methods therefor | Dae-Han Choi, Jisoo Kim, Sangheon Lee, Conan Chiang, S. M. Reza Sadjadi | 2013-01-22 |
| 8313301 | Cooled turbine blade shroud | — | 2012-11-20 |
| 8304262 | Wiggling control for pseudo-hardmask | Ben-Li Sheu, Rajinder Dhindsa, Vinay Pohray, Andrew D. Bailey, III | 2012-11-06 |