Issued Patents All Time
Showing 76–100 of 113 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10261014 | Near field metrology | Noam Sapiens, Joel Seligson, Vladimir Levinski, Daniel Kandel, Yoel Feler +2 more | 2019-04-16 |
| 10242290 | Method, system, and user interface for metrology target characterization | Inna Tarshish-Shapir, Yoel Feler, Anat Marchelli, Berta Dinu, Vladimir Levinski +4 more | 2019-03-26 |
| 10203247 | Systems for providing illumination in optical metrology | Gregory Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin +16 more | 2019-02-12 |
| 10197389 | Approaches in first order scatterometry overlay based on introduction of auxiliary electromagnetic fields | Vladimir Levinski, Yuri Paskover, Yuval Lubashevsky | 2019-02-05 |
| 10190979 | Metrology imaging targets having reflection-symmetric pairs of reflection-asymmetric structures | Yuri Paskover, Barry Loevsky, Daria Negri | 2019-01-29 |
| 10139528 | Compound objectives for imaging and scatterometry overlay | Joel Seligson, Vladimir Levinski, Yuri Paskover, Daniel Kandel, Andrew V. Hill | 2018-11-27 |
| 10126238 | Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology | Andrew V. Hill, Daniel Kandel, Ilan Sela, Ohad Bachar, Barak Bringoltz | 2018-11-13 |
| 10048132 | Simultaneous capturing of overlay signals from multiple targets | Andrew V. Hill, Yuri Paskover, Yuval Lubashevsky | 2018-08-14 |
| 9958385 | Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology | Andrew V. Hill, Daniel Kandel, Ilan Sela, Ohad Bachar, Barak Bringoltz | 2018-05-01 |
| 9921050 | Spectral control system | Andrew V. Hill, Ohad Bachar, Avi Abramov, Daria Negri | 2018-03-20 |
| 9851300 | Decreasing inaccuracy due to non-periodic effects on scatterometric signals | Barak Bringoltz, Ofer Zaharan, Nadav Carmel, Victoria Naipak, Alexander Svizher +2 more | 2017-12-26 |
| 9784987 | Apodization for pupil imaging scatterometry | Andrew V. Hill, Barak Bringoltz, Ohad Bachar, Mark Ghinovker, Zeev Bomzon +1 more | 2017-10-10 |
| 9719940 | Compressive sensing with illumination patterning | Andrew V. Hill, Avi Abramov | 2017-08-01 |
| 9618448 | Grazing order metrology | — | 2017-04-11 |
| 9581430 | Phase characterization of targets | Ohad Bachar, Daria Negri, Boris Golovanevsky, Barak Bringoltz, Daniel Kandel +8 more | 2017-02-28 |
| 9512985 | Systems for providing illumination in optical metrology | Gregory Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin +16 more | 2016-12-06 |
| 9429856 | Detectable overlay targets with strong definition of center locations | Barry Loevsky | 2016-08-30 |
| 9341769 | Spectral control system | Andrew V. Hill, Ohad Bachar, Avi Abramov, Daria Negri | 2016-05-17 |
| 9329033 | Method for estimating and correcting misregistration target inaccuracy | Eran Amit, Dana Klein, Guy M. Cohen, Amir Widmann, Nimrod Shuall +1 more | 2016-05-03 |
| 9255787 | Measurement of critical dimension and scanner aberration utilizing metrology targets | Barry Loevsky | 2016-02-09 |
| 9182219 | Overlay measurement based on moire effect between structured illumination and overlay target | Barry Loevsky, Zeev Bomzon | 2015-11-10 |
| 9164397 | Optics symmetrization for metrology | Daniel Kandel, Moshe Baruch, Joel Seligson, Alexander Svizher, Guy M. Cohen +4 more | 2015-10-20 |
| 9123649 | Fit-to-pitch overlay measurement targets | Barry Loevsky | 2015-09-01 |
| 9091650 | Apodization for pupil imaging scatterometry | Andrew V. Hill, Barak Bringoltz, Ohad Bachar, Mark Ghinovker, Zeev Bomzon +1 more | 2015-07-28 |
| 9080971 | Metrology systems and methods | Daniel Kandel, Vladimir Levinski, Alexander Svizher, Joel Seligson, Andrew V. Hill +6 more | 2015-07-14 |