Issued Patents All Time
Showing 126–150 of 296 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6354907 | Polishing apparatus including attitude controller for turntable and/or wafer carrier | Ichiju Satoh, Norio Kimura | 2002-03-12 |
| 6338670 | Method and system of manufacturing slurry for polishing, and method and system of manufacturing semiconductor devices | Yoshinori Yoshida | 2002-01-15 |
| 6334928 | Semiconductor processing system and method of using the same | Makoto Sekine, Nobuo Hayasaka | 2002-01-01 |
| 6335534 | Ion implantation apparatus, ion generating apparatus and semiconductor manufacturing method with ion implantation processes | Kyoichi Suguro, Atsushi Murakoshi | 2002-01-01 |
| 6331681 | Electrical connection device for forming and semiconductor device having metal bump electrical connection | — | 2001-12-18 |
| 6326658 | Semiconductor device including an interface layer containing chlorine | Yoshitaka Tsunashima, Masayuki Tanaka, Shigehiko Saida, Hirofumi Inoue, Takeshi Hamamoto | 2001-12-04 |
| 6316163 | Pattern forming method | Shunko Magoshi, Masamitsu Itoh, Shinji Sato, Soichi Inoue, Kazuyoshi Sugihara | 2001-11-13 |
| 6306669 | Method of manufacturing semiconductor device | Hiroyuki Yano | 2001-10-23 |
| 6301435 | Heating method | Shinichi Ito | 2001-10-09 |
| 6291891 | Semiconductor device manufacturing method and semiconductor device | Kazuyuki Higashi, Noriaki Matsunaga, Akihiro Kajita, Tetsuo Matsuda, Tadashi Iijima +5 more | 2001-09-18 |
| 6286524 | Wafer drying apparatus and method with residual particle removability enhancement | Hisashi Okuchi, Hiroshi Tomita, Soichi Nadahara | 2001-09-11 |
| 6284020 | Method of maintaining cleanliness of substrates and box for accommodating substrates | Ayako Mizuno, Makiko Katano | 2001-09-04 |
| 6273802 | Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device | Riichirou Aoki, Hiromi Yajima, Seiji Ishikawa, Manabu Tsujimura | 2001-08-14 |
| 6274507 | Plasma processing apparatus and method | Masaki Narita, Yukimasa Yoshida, Kei Hattori | 2001-08-14 |
| 6274512 | Method for manufacturing a semiconductor device | Hisataka Hayashi, Tokuhisa Ohiwa | 2001-08-14 |
| 6268641 | Semiconductor wafer having identification indication and method of manufacturing the same | Hiroyuki Yano | 2001-07-31 |
| 6265696 | Heat treatment method and a heat treatment apparatus for controlling the temperature of a substrate surface | Hideaki Sakurai, Akitoshi Kumagae, Iwao Higashikawa, Shinichi Ito, Tsunetoshi Arikado | 2001-07-24 |
| 6265323 | Substrate processing method and apparatus | Hiroko Nakamura, Shinichi Ito | 2001-07-24 |
| 6239441 | Apparatus for manufacturing a semiconductor device and a method for manufacturing a semiconductor device | Kyoichi Suguro | 2001-05-29 |
| 6239495 | Multichip semiconductor device and memory card | Koji Sakui, Junichi Miyamoto, Nobuo Hayasaka | 2001-05-29 |
| 6231917 | Method of forming liquid film | Shinichi Ito | 2001-05-15 |
| 6225033 | Method of forming a resist pattern | Yasunobu Onishi, Kentaro Matsunaga, Shoji Mimotogi | 2001-05-01 |
| 6200894 | Method for enhancing aluminum interconnect properties | Thomas J. Licata, Kenneth P. Rodbell | 2001-03-13 |
| 6200633 | Coating apparatus and coating method | Takahiro Kitano, Shinichi Ito | 2001-03-13 |
| 6190840 | Resist pattern forming method | Kenji Kawano, Shinichi Ito | 2001-02-20 |