Issued Patents All Time
Showing 151–175 of 296 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6162745 | Film forming method | Shinichi Ito, Koutarou Sho | 2000-12-19 |
| 6159303 | Liquid displacement apparatus and liquid displacement method | Soichi Nadahara | 2000-12-12 |
| 6147355 | Pattern forming method | Atsushi Ando, Kazuyoshi Sugihara, Tetsuro Nakasugi | 2000-11-14 |
| 6133121 | Apparatus for supporting semiconductor wafers and semiconductor wafer processing method using supporting apparatus | Yoshitaka Tsunashima, Shigeru Yonemoto | 2000-10-17 |
| 6124189 | Metallization structure and method for a semiconductor device | Toru Watanabe, Katsuhiko Hieda | 2000-09-26 |
| 6093931 | Pattern-forming method and lithographic system | Kazuyoshi Sugihara, Hiromi Niiyama, Shunko Magoshi, Atsushi Ando, Tetsuro Nakasugi +4 more | 2000-07-25 |
| 6091117 | Field effect transistor having elevated source and drain regions and methods of manufacturing the same | Jun-ichi Shiozawa, Yoshitaka Tsunashima | 2000-07-18 |
| 6071810 | Method of filling contact holes and wiring grooves of a semiconductor device | Junichi Wada, Atsuko Sakata, Tomio Katata, Takamasa Usui, Masahiko Hasunuma +3 more | 2000-06-06 |
| 6072162 | Device and method for heating substrate, and method for treating substrate | Shinichi Ito | 2000-06-06 |
| 6064466 | Planarization method and system using variable exposure | Takashi Sato, Junichiro Iba | 2000-05-16 |
| 6059880 | Coating apparatus | Takahiro Kitano, Shinichi Ito | 2000-05-09 |
| 6048791 | Semiconductor device with electrode formed of conductive layer consisting of polysilicon layer and metal-silicide layer and its manufacturing method | Tomio Katata | 2000-04-11 |
| RE36610 | Evacuation apparatus and evacuation method | Fumio Kuriyama, Yukio Murai, Manabu Tsujimura, Hiroshi Sobukawa | 2000-03-14 |
| 6015990 | Semiconductor memory device and method of manufacturing the same | Katsuhiko Hieda, Tsunetoshi Arikado | 2000-01-18 |
| 6001718 | Semiconductor device having a ternary compound low resistive electrode | Tomio Katata | 1999-12-14 |
| 5998100 | Fabrication process using a multi-layer antireflective layer | Tsukasa Azuma, Tokuhisa Ohiwa, Tetsuo Matsuda, David M. Dobuzinsky | 1999-12-07 |
| 5994218 | Method of forming electrical connections for a semiconductor device | Shigeki Sugimoto | 1999-11-30 |
| 5994030 | Pattern-forming method and lithographic system | Kazuyoshi Sugihara, Hiromi Niiyama, Shunko Magoshi, Atsushi Ando, Tetsuro Nakasugi +4 more | 1999-11-30 |
| 5989759 | Pattern forming method using alignment from latent image or base pattern on substrate | Atsushi Ando, Kazuyoshi Sugihara, Tetsuro Nakasugi | 1999-11-23 |
| 5980636 | Electrical connection device for forming metal bump electrical connection | — | 1999-11-09 |
| 5968268 | Coating apparatus and coating method | Takahiro Kitano, Shinichi Ito | 1999-10-19 |
| 5970352 | Field effect transistor having elevated source and drain regions and methods for manufacturing the same | Jun-ichi Shiozawa, Yoshitaka Tsunashima | 1999-10-19 |
| 5954570 | Conditioner for a polishing tool | Hiroyuki Yano, Norio Kimura, Noburu Shimizu | 1999-09-21 |
| 5950099 | Method of forming an interconnect | Naohiro Shoda | 1999-09-07 |
| 5888338 | Magnetron plasma processing apparatus and processing method | Hiromi Harada, Sinji Kubota, Hiromi Kumagai, Junichi Arami, Keiji Horioka +3 more | 1999-03-30 |