Issued Patents All Time
Showing 201–225 of 296 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5611942 | Method for producing tips for atomic force microscopes | Tadashi Mitsui | 1997-03-18 |
| 5609148 | Method and apparatus for dicing semiconductor wafers | Alexander Mitwalsky | 1997-03-11 |
| 5605574 | Semiconductor wafer support apparatus and method | Yoshitaka Tsunashima | 1997-02-25 |
| 5593537 | Apparatus for processing semiconductor wafers | William J. Cote, James Ryan, Hiroyuki Yano | 1997-01-14 |
| 5569392 | Method and apparatus for repairing defect on plane surface of phase shift mask | Motosuke Miyoshi | 1996-10-29 |
| 5552628 | Semiconductor device and method of manufacturing the same | Tohru Watanabe | 1996-09-03 |
| 5547787 | Exposure mask, exposure mask substrate, method for fabricating the same, and method for forming pattern based on exposure mask | Shinichi Ito, Haruo Okano, Toru Watanabe | 1996-08-20 |
| 5548183 | Magnetic field immersion type electron gun | Motosuke Miyoshi, Yuichiro Yamazaki | 1996-08-20 |
| 5543334 | Method of screening semiconductor device | Ichiro Yoshii, Hiroyuki Kamijoh, Yoshio Ozawa, Kikuo Yamabe, Kazuhiko Hashimoto +1 more | 1996-08-06 |
| 5538815 | Method for designing phase-shifting masks with automatization capability | Kazuko Oi, Shigehiro Hara, Kiyomi Koyama, Koji Hashimoto, Shinichi Ito | 1996-07-23 |
| 5539179 | Electrostatic chuck having a multilayer structure for attracting an object | Toshihisa Nozawa, Junichi Arami, Shinji Kubota, Isahiro Hasegawa | 1996-07-23 |
| 5536603 | Phase shift mask and method of fabricating the same | Takashi Tsuchiya, Masami Watase, Toru Watanabe | 1996-07-16 |
| 5534106 | Apparatus for processing semiconductor wafers | William J. Cote, James Ryan, Hiroyuki Yano | 1996-07-09 |
| 5498874 | Defect detecting apparatus and method | Motosuke Miyoshi | 1996-03-12 |
| 5491425 | Apparatus for evaluating characteristics of semiconductor device and method of evaluating characteristics of semiconductor device using the same | Toru Watanabe, Yuri Yonekura | 1996-02-13 |
| 5491339 | Charged particle detection device and charged particle radiation apparatus | Tadashi Mitsui, Nozomu Harada, Motosuke Miyoshi, Makoto Sekine, Haruo Okano | 1996-02-13 |
| 5489336 | Apparatus for forming a silicon oxide film on a silicon wafer | Masako Kodera, Masami Watase, Shiro Mishima | 1996-02-06 |
| 5483568 | Pad condition and polishing rate monitor using fluorescence | Hiroyuki Yano | 1996-01-09 |
| 5474643 | Plasma processing apparatus | Junichi Arami, Tamio Endo, Shiro Koyama, Kazuo Kikuchi, Teruaki Shiraishi +3 more | 1995-12-12 |
| 5444207 | Plasma generating device and surface processing device and method for processing wafers in a uniform magnetic field | Makoto Sekine, Keiji Horioka, Haruo Okano, Isahiro Hasegawa, Masaki Narita | 1995-08-22 |
| 5437733 | Method and apparatus for treating a substrate | — | 1995-08-01 |
| 5431561 | Method and apparatus for heat treating | Kikuo Yamabe, Keitaro Imai, Ken Nakao, Seikou Ueno | 1995-07-11 |
| 5429730 | Method of repairing defect of structure | Hiroko Nakamura, Haruki Komano, Kazuyoshi Sugihara, Keiji Horioka, Mitsuyo Kariya +7 more | 1995-07-04 |
| 5415191 | Arrangement for cleaning semiconductor wafers using mixer | Noriyoshi Mashimo | 1995-05-16 |
| 5413663 | Plasma processing apparatus | Masahiro Shimizu, Takayuki Fukasawa, Yuichiro Yamazaki, Motosuke Miyoshi, Haruo Okano | 1995-05-09 |