Issued Patents All Time
Showing 251–275 of 296 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5255153 | Electrostatic chuck and plasma apparatus equipped therewith | Toshihisa Nozawa, Junichi Arami, Isahiro Hasegawa | 1993-10-19 |
| 5250463 | Method of making doped semiconductor film having uniform impurity concentration on semiconductor substrate | Yuuichi Mikata, Katsunori Ishihara | 1993-10-05 |
| 5250137 | Plasma treating apparatus | Junichi Arami, Toshihisa Nozawa, Keiji Horioka | 1993-10-05 |
| 5236562 | Method for discharging hydrogen from a vacuum vessel using a roughing vacuum pump and a turbo-molecular pump | Haruo Okano, Manabu Tsujimura, Akio Shibata | 1993-08-17 |
| 5225036 | Method of manufacturing semiconductor device | Tohru Watanabe | 1993-07-06 |
| 5178638 | Pressure-reduced chamber system having a filter means | Satoshi Kaneko, Taichi Fugita, Yukimasa Yoshida | 1993-01-12 |
| 5164814 | Semiconductor device with customized wiring | — | 1992-11-17 |
| 5162241 | Method of manufacturing a semiconductor device | Kunihiro MORI | 1992-11-10 |
| 5144147 | Ion implantation apparatus and method of cleaning the same | Masakazu Shiozaki | 1992-09-01 |
| 5138169 | Method and apparatus for irradiating low-energy electrons | Yuichiro Yamazaki, Motosuke Miyoshi | 1992-08-11 |
| 5101259 | Semiconductor device and manufacturing method thereof | Tohru Watanabe | 1992-03-31 |
| 5093273 | Method of manufacturing a semiconductor device | — | 1992-03-03 |
| 5068709 | Semiconductor device having a backplate electrode | Hidemitsu Egawa, Riichirou Aoki | 1991-11-26 |
| 5067437 | Apparatus for coating of silicon semiconductor surface | Tohru Watanabe | 1991-11-26 |
| 5062271 | Evacuation apparatus and evacuation method | Fumio Kuriyama, Yukio Murai, Manabu Tsujimura, Hiroshi Sobukawa | 1991-11-05 |
| 5045419 | Pattern exposure/transfer method and pattern exposure/transfer mask apparatus | — | 1991-09-03 |
| 5032491 | Method of forming a fine pattern | Tohru Watanabe | 1991-07-16 |
| 5030908 | Method of testing semiconductor elements and apparatus for testing the same | Motosuke Miyoshi | 1991-07-09 |
| 5021702 | Electron beam apparatus including a plurality of ion pump blocks | Motosuke Miyoshi | 1991-06-04 |
| 5015330 | Film forming method and film forming device | Takahiko Moriya, Shinji Miyazaki, Yoshio Kumagai, Susumu Tanaka | 1991-05-14 |
| 4990218 | Method of testing conductor film quality | Atsumu Tezaki | 1991-02-05 |
| 4954218 | Method for etching a pattern | Tohru Watanabe, Masami Watase | 1990-09-04 |
| 4952993 | Semiconductor device and manufacturing method thereof | — | 1990-08-28 |
| 4937652 | Semiconductor device and method of manufacturing the same | Toshinori Shinki, Toshiaki Idaka, Riichirou Aoki | 1990-06-26 |
| 4926648 | Turbomolecular pump and method of operating the same | Fumio Kuriyama, Yukio Murai, Manabu Tsujimura, Hiroshi Sobukawa | 1990-05-22 |