Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5415191 | Arrangement for cleaning semiconductor wafers using mixer | Katsuya Okumura | 1995-05-16 |
| 5352359 | Ultraviolet reactor with mixing baffle plates | Hiroshi Nagai, Ken Nakajima, Yukio Ikeda | 1994-10-04 |
| 5318633 | Heat treating apparatus | Akihito Yamamoto, Naohiko Yasuhisa, Masaharu Abe, Shingo Watanabe | 1994-06-07 |
| 5261966 | Method of cleaning semiconductor wafers using mixer containing a bundle of gas permeable hollow yarns | Katsuya Okumura | 1993-11-16 |