Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8614510 | Semiconductor device including a metal wiring with a metal cap | Hideyuki Tomizawa, Noriaki Matsunaga, Tadayoshi Watanabe, Masako Kodera | 2013-12-24 |
| 7198552 | Polishing apparatus | Toyomi Nishi, Tetsuji Togawa, Harumitsu Saito, Manabu Tsujimura, Hiromi Yajima +7 more | 2007-04-03 |
| 6997782 | Polishing apparatus and a method of polishing and cleaning and drying a wafer | Toyomi Nishi, Tetsuji Togawa, Harumitsu Saito, Manabu Tsujimura, Hiromi Yajima +7 more | 2006-02-14 |
| 6500051 | Polishing apparatus and method | Toyomi Nishi, Tetsuji Togawa, Harumitsu Saito, Manabu Tsujimura, Hiromi Yajima +7 more | 2002-12-31 |
| 5846335 | Method for cleaning workpiece | Toshiro Maekawa, Koji Ono, Motoaki Okada, Tamami Takahashi, Masako Kodera +3 more | 1998-12-08 |
| 5695601 | Method for planarizing a semiconductor body by CMP method and an apparatus for manufacturing a semiconductor device using the method | Masako Kodera, Atsushi Shigeta, Hiromi Yajima, Riichirou Aoki | 1997-12-09 |
| 5679063 | Polishing apparatus | Norio Kimura, You Ishii, Hozumi Yasuda, Koji Saito, Masako Watase | 1997-10-21 |
| 5679059 | Polishing aparatus and method | Toyomi Nishi, Tetsuji Togawa, Harumitsu Saito, Manabu Tsujimura, Hiromi Yajima +7 more | 1997-10-21 |
| 5489336 | Apparatus for forming a silicon oxide film on a silicon wafer | Masako Kodera, Masami Watase, Katsuya Okumura | 1996-02-06 |
| 5395645 | Method for forming a silicon oxide film on a silicon waffer | Masako Kodera, Masami Watase, Katsuya Okumura | 1995-03-07 |
| 4920750 | Heat exchanging system for power generation | Naotsugu Iishiki, Shigetou Okano | 1990-05-01 |
| 4876856 | Heat exchanging system | Naotsugu Iishiki, Shigetou Okano | 1989-10-31 |