Issued Patents All Time
Showing 51–75 of 124 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10061212 | Metrology target, method and apparatus, target design method, computer program and lithographic system | Richard Johannes Franciscus Van Haren, Everhardus Cornelis Mos, Youping Zhang | 2018-08-28 |
| 9910366 | Metrology method and apparatus, lithographic system and device manufacturing method | Scott Anderson Middlebrooks, Niels Geypen, Hendrik Jan Hidde Smilde, Alexander Straaijer, Markus Gerardus Martinus Maria Van Kraaij | 2018-03-06 |
| 9746785 | Sub-wavelength segmentation in measurement targets on substrates | Marcus Adrianus Van De Kerkhof, Sami Musa | 2017-08-29 |
| 9714827 | Metrology method and apparatus, lithographic system, device manufacturing method and substrate | Kaustuve Bhattacharyya, Hendrik Jan Hidde Smilde | 2017-07-25 |
| 9632430 | Lithographic system, lithographic method and device manufacturing method | Everhardus Cornelis Mos, Scott Anderson Middlebrooks | 2017-04-25 |
| 9594310 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Marcus Adrianus Van De Kerkhof, Andreas Fuchs, Martyn John Coogans | 2017-03-14 |
| 9594311 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Marcus Adrianus Van De Kerkhof, Andreas Fuchs, Martyn John Coogans | 2017-03-14 |
| 9494872 | Inspection method for lithography | Kaustuve Bhattacharyya, Arie Jeffrey Den Boef, Marcus Adrianus Van De Kerkhof | 2016-11-15 |
| 9470986 | Inspection methods, inspection apparatuses, and lithographic apparatuses | Andreas Fuchs, Scott Anderson Middlebrooks, Panagiotis Pieter Bintevinos | 2016-10-18 |
| 9331022 | Substrate and patterning device for use in metrology, metrology method and device manufacturing method | Patrick Warnaar, Kaustuve Bhattacharyya, Hendrik Jan Hidde Smilde, Michael Kubis | 2016-05-03 |
| 9255892 | Substrate, a method of measuring a property, an inspection apparatus and a lithographic apparatus | Marcus Adrianus Van De Kerkhof, Hendrik Jan Hidde Smilde | 2016-02-09 |
| 9235141 | Inspection apparatus and method for measuring a property of a substrate | Arie Jeffrey Den Boef, Everhardus Cornelis Mos, Andreas Fuchs, Martyn John Coogans, Hendrik Jan Hidde Smilde | 2016-01-12 |
| 9229338 | Substrate, a method of measuring a property, an inspection apparatus and a lithographic apparatus | Marcus Adrianus Van De Kerkhof, Hendrik Jan Hidde Smilde | 2016-01-05 |
| 9188875 | Calibration method, inspection method and apparatus, lithographic apparatus, and lithographic processing cell | Hugo Augustinus Joseph Cramer | 2015-11-17 |
| 9158194 | Metrology method and apparatus, and device manufacturing method | Armand Eugene Albert Koolen, Henricus Petrus Maria Pellemans, Peter Clement Paul Vanoppen, Michael Kubis | 2015-10-13 |
| 8982329 | Method and apparatus for measuring line end shortening, substrate and patterning device | Arie Jeffrey Den Boef, Richard Johannes Franciscus Van Haren, Marcus Adrianus Van De Kerkhof | 2015-03-17 |
| 8908147 | Method and apparatus for determining an overlay error | Arie Jeffrey Den Boef, Andreas Fuchs, Martyn John Coogans, Kaustuve Bhattacharyya, Stephen Morgan +1 more | 2014-12-09 |
| 8786825 | Apparatus and method of measuring a property of a substrate | Marcus Adrianus Van De Kerkhof, Andreas Fuchs, Martyn John Coogans | 2014-07-22 |
| 8760662 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers +4 more | 2014-06-24 |
| 8749786 | Inspection method and apparatus, and corresponding lithographic apparatus | Andreas Fuchs, Scott Anderson Middlebrooks, Panagiotis Pieter Bintevinos | 2014-06-10 |
| 8724109 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Irwan Dani Setija | 2014-05-13 |
| 8724087 | Inspection apparatus for lithography | Marcus Adrianus Van De Kerkhof, Antoine Gaston Marie Kiers, Leonardus Henricus Marie Verstappen, Scott Anderson Middlebrooks, Andreas Fuchs | 2014-05-13 |
| 8709687 | Substrate and patterning device for use in metrology, metrology method and device manufacturing method | Patrick Warnaar, Kaustuve Bhattacharyya, Hendrik Jan Hidde Smilde, Michael Kubis | 2014-04-29 |
| 8706442 | Alignment system, lithographic system and method | Everhardus Cornelis Mos, Henricus Johannes Lambertus Megens, Hubertus Johannes Gertrudus Simons, Scott Anderson Middlebrooks | 2014-04-22 |
| 8665417 | Apparatus and method for inspecting a substrate | Andreas Fuchs | 2014-03-04 |