Issued Patents All Time
Showing 101–124 of 124 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7629697 | Marker structure and method for controlling alignment of layers of a multi-layered substrate | Richard Johannes Franciscus Van Haren, Arie Jeffrey Den Boef, Jacobus Burghoorn, Bartolomeus Petrus Rijpers | 2009-12-08 |
| 7619737 | Method of measurement, an inspection apparatus and a lithographic apparatus | Everhardus Cornelis Mos | 2009-11-17 |
| 7619738 | Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatus | Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Sanjay Lalbahadoersing, Henry Megens | 2009-11-17 |
| 7599064 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method, substrate for use in the methods | Everhardus Cornelis Mos, Arie Jeffrey Den Boef | 2009-10-06 |
| 7573584 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Everhardus Cornelis Mos | 2009-08-11 |
| 7564555 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Mircea Dusa, Everhardus Cornelis Mos, Stefan Carolus Jacobus Antonius Keij | 2009-07-21 |
| 7565219 | Lithographic apparatus, method of determining a model parameter, device manufacturing method, and device manufactured thereby | Jeroen Huijbregstse, Sicco Ian Schets, Bart Swinnen | 2009-07-21 |
| 7558643 | Lithographic apparatus, method of determining a model parameter, device manufacturing method, and device manufactured thereby | Jeroen Huijbregtse, Sicco Ian Schets, Bart Swinnen | 2009-07-07 |
| 7532305 | Lithographic apparatus and device manufacturing method using overlay measurement | Arie Jeffrey Den Boef, Everhardus Cornelis Mos, Stefan Carolus Jacobus Antonius Keij | 2009-05-12 |
| 7532307 | Focus determination method, device manufacturing method, and mask | Arie Jeffrey Den Boef, Mircea Dusa, Antoine Gaston Marie Kiers | 2009-05-12 |
| 7486408 | Lithographic apparatus and device manufacturing method with reduced scribe lane usage for substrate measurement | Arie Jeffrey Den Boef, Richard Johannes Franciscus Van Haren, Everhardus Cornelis Mos | 2009-02-03 |
| 7476490 | Method for producing a marker on a substrate, lithographic apparatus and device manufacturing method | Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Everhardus Cornelis Mos, Rene Monshouwer | 2009-01-13 |
| 7460231 | Alignment tool for a lithographic apparatus | Sami Musa, Richard Johannes Franciscus Van Haren | 2008-12-02 |
| 7391513 | Lithographic apparatus and device manufacturing method using overlay measurement quality indication | Arie Jeffrey Den Boef, Everhardus Cornelis Mos, Stefan Carolus Jacobus Antonius Keij | 2008-06-24 |
| 7330261 | Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatus | Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Sanjay Lalbahadoersing, Henry Megens | 2008-02-12 |
| 7112813 | Device inspection method and apparatus using an asymmetric marker | Arie Jeffrey Den Boef, Frank Bornebroek, Hugo Augustinus Joseph Cramer, Mircea Dusa, Richard Johannes Franciscus Van Haren +7 more | 2006-09-26 |
| 7084955 | Lithographic apparatus | Cheng-Qun Gui, Henricus Wilhelmus Maria Van Buel, Arie Jeffrey Den Boef | 2006-08-01 |
| 7064807 | Lithographic apparatus | Cheng-Qun Gui, Henricus Wilhelmus Maria Van Buel, Arie Jeffrey Den Boef | 2006-06-20 |
| 7030961 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Arie Jeffrey Den Boef, Everhardus Cornelis Mos | 2006-04-18 |
| 6987556 | Lithographic projection apparatus, a method for determining a position of a substrate alignment mark, a device manufacturing method and device manufactured thereby | Irwan Dani Setija, Everhardus Cornelis Mos | 2006-01-17 |
| 6879868 | Alignment system for lithographic apparatus for measuring a position of an alignment mark | Everhardus Cornelis Mos | 2005-04-12 |
| 6768539 | Lithographic apparatus | Cheng-Qun Gui, Henricus Van Buel, Arie Jeffrey Den Boef | 2004-07-27 |
| 6732004 | Computer program for determining a corrected position of a measured alignment mark, device manufacturing method, and device manufactured thereby | Everhardus Cornelis Mos | 2004-05-04 |
| 6704089 | Lithographic projection apparatus, a method for determining a position of a substrate alignment mark, a device manufacturing method and device manufactured thereby | Irwan Dani Setija, Everhardus Cornelis Mos | 2004-03-09 |