Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7565219 | Lithographic apparatus, method of determining a model parameter, device manufacturing method, and device manufactured thereby | Maurits Van Der Schaar, Sicco Ian Schets, Bart Swinnen | 2009-07-21 |
| 7288779 | Method for position determination, method for overlay optimization, and lithographic projection apparatus | Sicco Ian Schets, Allan Dunbar, Nicolaas Petrus Van Der Aa | 2007-10-30 |