Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7649636 | Optical metrology system and metrology mark characterization device | Arie Jeffrey Den Boef, Robert Martinus Maria Mattheij, Henricus Gerhardus Ter Morsche | 2010-01-19 |
| 7288779 | Method for position determination, method for overlay optimization, and lithographic projection apparatus | Sicco Ian Schets, Jeroen Huijbregstse, Allan Dunbar | 2007-10-30 |