Issued Patents All Time
Showing 26–50 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11248603 | Thrust runner vibration dampening spring in electrical submersible pump | Risa Rutter | 2022-02-15 |
| 11189517 | RF electrostatic chuck filter circuit | Edward Haywood, Adam J. Fischbach, Timothy Joseph Franklin | 2021-11-30 |
| 11130142 | Showerhead having a detachable gas distribution plate | Dmitry Lubomirsky, Vladimir Knyazik, Hamid Noorbakhsh, Jason C. Della Rosa, Jennifer Y. Sun +1 more | 2021-09-28 |
| 11065680 | Mesh for wear resistance in components and components including the wear resistant mesh | Ignacio Martinez | 2021-07-20 |
| 11043361 | Symmetric VHF source for a plasma reactor | Kartik Ramaswamy, Igor Markovsky, Zhigang Chen, James D. Carducci, Kenneth S. Collins +3 more | 2021-06-22 |
| 10950477 | Ceramic heater and esc with enhanced wafer edge performance | Xing Lin, Jianhua Zhou, Jian J. Chen, Juan Carlos Rocha-Alvarez | 2021-03-16 |
| 10941779 | Abrasion resistant inserts in centrifugal well pump stages | Ignacio Alonso Martinez | 2021-03-09 |
| 10930475 | Graded in-situ charge trapping layers to enable electrostatic chucking and excellent particle performance for boron-doped carbon films | Prashant Kumar Kulshreshtha, Ziqing Duan, Abdul Aziz Khaja, Amit Kumar BANSAL | 2021-02-23 |
| 10923334 | Selective deposition of hardmask | Satya THOKACHICHU, Edward P. Hammond, IV, Viren Kalsekar, Sarah Michelle Bobek, Abdul Aziz Khaja +4 more | 2021-02-16 |
| 10876534 | Combined pump and motor with a stator forming a cavity which houses an impeller between upper and lower diffusers with the impeller having a circumferential magnet array extending upward and downward into diffuser annular clearances | Nikolas Davis, Ameen Muhammed, Carroll Dearman, Gary Williams | 2020-12-29 |
| 10879041 | Method and apparatus of achieving high input impedance without using ferrite materials for RF filter applications in plasma chambers | Abdul Aziz Khaja, Amit Kumar BANSAL, Kwangduk Douglas Lee, Xing Lin, Jianhua Zhou +2 more | 2020-12-29 |
| 10830241 | Permanent magnet pump | Ameen Muhammed, Carroll Dearman, Nikolas Davis | 2020-11-10 |
| 10663491 | Voltage-current probe for measuring radio-frequency electrical power in a high-temperature environment and method of calibrating the same | Jay D. Pinson, II, Juan Carlos Rocha, Abdul Aziz Khaja | 2020-05-26 |
| 10625277 | Showerhead having a detachable gas distribution plate | Dmitry Lubomirsky, Vladimir Knyazik, Hamid Noorbakhsh, Jason C. Della Rosa, Jennifer Y. Sun +1 more | 2020-04-21 |
| 10580623 | Plasma processing using multiple radio frequency power feeds for improved uniformity | Ganesh Balasubramanian, Thuy Britcher, Jay D. Pinson, II, Hiroji Hanawa, Juan Carlos Rocha-Alvarez +4 more | 2020-03-03 |
| 10533538 | Cooling device for components of wind turbines | Juan Jose Aguas Alcalde, Leire Hurtado Garcia, Adolfo Azcarate Azcona | 2020-01-14 |
| 10450653 | High impedance RF filter for heater with impedance tuning device | Jian J. Chen, Mohamad A. Ayoub, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan, Jianhua Zhou | 2019-10-22 |
| 10401804 | Mate controller | Donald Van Zile, III, Adrian Ilie | 2019-09-03 |
| 10403535 | Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system | Jay D. Pinson, II, Hiroji Hanawa, Jianhua Zhou, Xing Lin, Ren-Guan Duan +11 more | 2019-09-03 |
| 10344866 | Seal assembly for abrasion resistant bearing of centrifugal pump | Mike Allen Swatek, Risa Rutter, Jimmy J. Donnell, Ryan P. Semple | 2019-07-09 |
| 10325800 | High temperature electrostatic chucking with dielectric constant engineered in-situ charge trap materials | Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Bok Hoen Kim, Swayambhu Prasad Behera, Ganesh Balasubramanian +2 more | 2019-06-18 |
| 10128088 | Graded in-situ charge trapping layers to enable electrostatic chucking and excellent particle performance for boron-doped carbon films | Prashant Kumar Kulshreshtha, Ziqing Duan, Abdul Aziz Khaja, Amit Kumar BANSAL | 2018-11-13 |
| 10125422 | High impedance RF filter for heater with impedance tuning device | Jian J. Chen, Mohamad A. Ayoub, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan, Jianhua Zhou | 2018-11-13 |
| 10100408 | Edge hump reduction faceplate by plasma modulation | Sungwon Ha, Kwangduk Douglas Lee, Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Martin Jay Seamons +5 more | 2018-10-16 |
| 9824862 | Symmetric VHF source for a plasma reactor | Kartik Ramaswamy, Igor Markovsky, Zhigang Chen, James D. Carducci, Kenneth S. Collins +3 more | 2017-11-21 |