Issued Patents All Time
Showing 51–54 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9610591 | Showerhead having a detachable gas distribution plate | Dmitry Lubomirsky, Vladimir Knyazik, Hamid Noorbakhsh, Jason C. Della Rosa, Jennifer Y. Sun +1 more | 2017-04-04 |
| 9305749 | Methods of directing magnetic fields in a plasma source, and associated systems | Jay D. Pinson, II, Hiroji Hanawa, Juan Carlos Rocha-Alvarez | 2016-04-05 |
| 8920597 | Symmetric VHF source for a plasma reactor | Kartik Ramaswamy, Igor Markovsky, Zhigang Chen, James D. Carducci, Kenneth S. Collins +3 more | 2014-12-30 |
| 8878926 | Apparatus and method for analyzing thermal properties of composite structures | Kartik Ramaswamy, Troy S. Detrick, Kenneth S. Collins | 2014-11-04 |