Issued Patents All Time
Showing 151–175 of 234 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9484202 | Apparatus and methods for spacer deposition and selective removal in an advanced patterning process | Jie Zhou, Chentsau Ying, Shambhu N. Roy, Jingjing Liu, Ellie Yieh | 2016-11-01 |
| 9478433 | Cyclic spacer etching process with improved profile control | Qingjun Zhou, Jungmin Ko, Tom Choi, Sean S. Kang, Jeremiah T. Pender +1 more | 2016-10-25 |
| 9412613 | Development of high etch selective hardmask material by ion implantation into amorphous carbon films | Pramit Manna, Abhijit Basu Mallick, Ludovic Godet, Yongmei Chen, Jun Xue +2 more | 2016-08-09 |
| 9406522 | Single platform, multiple cycle spacer deposition and etch | Hao Chen, Chentsau Ying, Ellie Yieh | 2016-08-02 |
| 9385028 | Air gap process | Takehito Koshizawa | 2016-07-05 |
| 9385219 | Method and apparatus for selective deposition | Ellie Yieh, Ludovic Godet, Yin Fan, Tristan Y. Ma | 2016-07-05 |
| 9379021 | Method to reduce K value of dielectric layer for advanced FinFET formation | Ellie Yieh, Ludovic Godet | 2016-06-28 |
| 9368448 | Metal-containing films as dielectric capping barrier for advanced interconnects | Yihong Chen, Abhijit Basu Mallick, Mehul Naik | 2016-06-14 |
| 9368370 | Temperature ramping using gas distribution plate heat | Sergey G. Belostotskiy, Chinh Dinh, Qingjun Zhou, Andrew Nguyen | 2016-06-14 |
| 9305796 | Methods for etching silicon using hydrogen radicals in a hot wire chemical vapor deposition chamber | Sukti Chatterjee | 2016-04-05 |
| 9299577 | Methods for etching a dielectric barrier layer in a dual damascene structure | He Ren, Chia-Ling Kao, Sean S. Kang, Jeremiah T. Pender, Mehul Naik | 2016-03-29 |
| 9287095 | Semiconductor system assemblies and methods of operation | Andrew Nguyen, Kartik Ramaswamy, Bradley J. Howard, Yogananda Sarode Vishwanath | 2016-03-15 |
| 9269590 | Spacer formation | Olivier Luere, Sean S. Kang | 2016-02-23 |
| 9257330 | Ultra-thin structure to protect copper and method of preparation | Amit Chatterjee, Geetika Bajaj, Pramit Manna, He Ren, Tapash Chakraborty +3 more | 2016-02-09 |
| 9214377 | Methods for silicon recess structures in a substrate by utilizing a doping layer | Ying Zhang, Hua Chung, Ludovic Godet | 2015-12-15 |
| 9190290 | Halogen-free gas-phase silicon etch | Jun Xue, Chentsau Ying | 2015-11-17 |
| 9190498 | Technique for forming a FinFET device using selective ion implantation | Adam Brand, John Hautala, Ludovic Godet, Yuri Erokhin | 2015-11-17 |
| 9165783 | Method of patterning a low-k dielectric film | Jeremiah T. Pender, Qingjun Zhou, Dmitry Lubomirsky, Sergey G. Belostotskiy | 2015-10-20 |
| 9093389 | Method of patterning a silicon nitride dielectric film | Jeremiah T. Pender, Qingjun Zhou, Dmitry Lubomirsky, Sergey G. Belostotskiy | 2015-07-28 |
| 9059398 | Methods for etching materials used in MRAM applications | Jisoo Kim, Mang-Mang Ling, Khoi Doan, Chi Hong Ching | 2015-06-16 |
| 9006106 | Method of removing a metal hardmask | Chia-Ling Kao, Kwang Soo Kim, Sean S. Kang | 2015-04-14 |
| 8987139 | Method of patterning a low-k dielectric film | Chia-Ling Kao, Sean S. Kang | 2015-03-24 |
| 8980758 | Methods for etching an etching stop layer utilizing a cyclical etching process | Mang-Mang Ling, Sean S. Kang, Jeremiah T. Pender, Bradley J. Howard | 2015-03-17 |
| 8980754 | Method of removing a photoresist from a low-k dielectric film | Yifeng Zhou, Khoi Doan, Jeremiah T. Pender | 2015-03-17 |
| 8940642 | Method of multiple patterning of a low-K dielectric film | Yifeng Zhou, Dmitry Lubomirsky, Ellie Yieh | 2015-01-27 |