Issued Patents All Time
Showing 26–50 of 213 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830734 | Thermal deposition of silicon-germanium | Huiyuan Wang, Susmit Singha Roy | 2023-11-28 |
| 11817320 | CVD based oxide-metal multi structure for 3D NAND memory devices | Susmit Singha Roy, Kelvin Chan, Hien Minh Le, Sanjay Kamath, Srinivas Gandikota +1 more | 2023-11-14 |
| 11791155 | Diffusion barriers for germanium | Huiyuan Wang, Susmit Singha Roy, Takehito Koshizawa, Bo Qi, Nitin K. Ingle | 2023-10-17 |
| 11784042 | Carbon hard masks for patterning applications and methods related thereto | Eswaranand Venkatasubramanian, Yang Yang, Pramit Manna, Kartik Ramaswamy, Takehito Koshizawa | 2023-10-10 |
| 11781218 | Defect free germanium oxide gap fill | Huiyuan Wang, Susmit Singha Roy, Takehito Koshizawa, Bo Qi | 2023-10-10 |
| 11769666 | Selective deposition of silicon using deposition-treat-etch process | Rui Cheng, Fei Wang, Robert Jan Visser | 2023-09-26 |
| 11756785 | Molecular layer deposition contact landing protection for 3D NAND | Bhaskar Jyoti Bhuyan, Zeqing Shen, Susmit Singha Roy | 2023-09-12 |
| 11732352 | Hydrogen free silicon dioxide | Zeqing Shen, Bo Qi, Nitin K. Ingle | 2023-08-22 |
| 11705335 | Conformal high concentration boron doping of semiconductors | Srinivas Gandikota, Swaminathan Srinivasan, Rui Cheng, Susmit Singha Roy, Gaurav Thareja +2 more | 2023-07-18 |
| 11702751 | Non-conformal high selectivity film for etch critical dimension control | Bo Qi, Huiyuan Wang, Yingli Rao | 2023-07-18 |
| 11682554 | Catalytic thermal deposition of carbon-containing materials | Zeqing Shen, Bo Qi | 2023-06-20 |
| 11676858 | High bias deposition of high quality gapfill | Samuel E. Gottheim, Eswaranand Venkatasubramanian, Pramit Manna | 2023-06-13 |
| 11676813 | Doping semiconductor films | Aykut Aydin, Rui Cheng, Yi Yang, Krishna Nittala, Karthik Janakiraman +1 more | 2023-06-13 |
| 11658026 | Conformal silicon oxide film deposition | Zeqing Shen, Bo Qi | 2023-05-23 |
| 11655537 | HDP sacrificial carbon gapfill | Zeqing Shen, Bo Qi | 2023-05-23 |
| 11638374 | Multicolor approach to DRAM STI active cut patterning | Tejinder Singh, Takehito Koshizawa, Pramit Manna, Nancy Fung, Eswaranand Venkatasubramanian +2 more | 2023-04-25 |
| 11626278 | Catalytic formation of boron and carbon films | Bo Qi, Zeqing Shen | 2023-04-11 |
| 11621226 | Graphene diffusion barrier | Yong Wu, Srinivas Gandikota, Srinivas D. Nemani | 2023-04-04 |
| 11621160 | Doped and undoped vanadium oxides for low-k spacer applications | Eswaranand Venkatasubramanian, Srinivas Gandikota, Kelvin Chan, Atashi Basu | 2023-04-04 |
| 11615966 | Flowable film formation and treatments | Shishi Jiang, Praket P. Jha | 2023-03-28 |
| 11603591 | Pulsed plasma (DC/RF) deposition of high quality C films for patterning | Eswaranand Venkatasubramanian, Yang Yang, Pramit Manna, Kartik Ramaswamy, Takehito Koshizawa | 2023-03-14 |
| 11594416 | Tribological properties of diamond films | Vicknesh Sahmuganathan, Jiteng Gu, Eswaranand Venkatasubramanian, Kian Ping Loh, John Sudijono +1 more | 2023-02-28 |
| 11594415 | PECVD tungsten containing hardmask films and methods of making | Susmit Singha Roy, Pramit Manna, Rui Cheng | 2023-02-28 |
| 11578409 | Low deposition rates for flowable PECVD | Shishi Jiang, Pramit Manna | 2023-02-14 |
| 11560626 | Substrate processing chamber | Timothy Joseph Franklin, Adam J. Fischbach, Edward Haywood, Pramit Manna, Carlaton WONG +2 more | 2023-01-24 |