Issued Patents All Time
Showing 26–50 of 79 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10705434 | Verification metrology target and their design | Michael Adel, Inna Tarshish-Shapir, Jeremy (Shi-Ming) Wei | 2020-07-07 |
| 10565697 | Utilizing overlay misregistration error estimations in imaging overlay metrology | Tzahi Grunzweig, Nadav Gutman, David Gready, Vladimir Levinski, Claire E. Staniunas +2 more | 2020-02-18 |
| 10527951 | Compound imaging metrology targets | Raviv Yohanan, Eran Amit, Tal Itzkovich, Nuriel Amir | 2020-01-07 |
| 10242290 | Method, system, and user interface for metrology target characterization | Inna Tarshish-Shapir, Yoel Feler, Anat Marchelli, Berta Dinu, Vladimir Levinski +4 more | 2019-03-26 |
| 10203247 | Systems for providing illumination in optical metrology | Gregory Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin +16 more | 2019-02-12 |
| 10203200 | Analyzing root causes of process variation in scatterometry metrology | Tal Marciano, Michael Adel, Barak Bringoltz, Dana Klein, Tal Itzkovich +2 more | 2019-02-12 |
| 9869543 | Reducing algorithmic inaccuracy in scatterometry overlay metrology | Barak Bringoltz, Daniel Kandel, Vladimir Levinski, Zeev Bomzon | 2018-01-16 |
| 9784987 | Apodization for pupil imaging scatterometry | Andrew V. Hill, Amnon Manassen, Barak Bringoltz, Ohad Bachar, Zeev Bomzon +1 more | 2017-10-10 |
| 9702693 | Apparatus for measuring overlay errors | Michael Adel, Walter D. Mieher, Ady Levy, Dan Wack | 2017-07-11 |
| 9512985 | Systems for providing illumination in optical metrology | Gregory Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin +16 more | 2016-12-06 |
| 9347879 | Apparatus and methods for detecting overlay errors using scatterometry | Michael Adel, Walter D. Mieher | 2016-05-24 |
| 9182680 | Apparatus and methods for determining overlay of structures having rotational or mirror symmetry | — | 2015-11-10 |
| 9091650 | Apodization for pupil imaging scatterometry | Andrew V. Hill, Amnon Manassen, Barak Bringoltz, Ohad Bachar, Zeev Bomzon +1 more | 2015-07-28 |
| RE45245 | Apparatus and methods for determining overlay of structures having rotational or mirror symmetry | — | 2014-11-18 |
| 8781211 | Rotational multi-layer overlay marks, apparatus, and methods | — | 2014-07-15 |
| 8741668 | Thin overlay mark for imaging based metrology | — | 2014-06-03 |
| 8513822 | Thin overlay mark for imaging based metrology | — | 2013-08-20 |
| 8390808 | Enhanced OVL dummy field enabling “on-the-fly” OVL measurement methods | Vladimir Levinski, Michael Adel, Alexander Svizher | 2013-03-05 |
| 8345243 | Overlay metrology target | Vladimir Levinski | 2013-01-01 |
| 8330281 | Overlay marks, methods of overlay mark design and methods of overlay measurements | Michael Adel, Walter D. Mieher, Ady Levy, Dan Wack | 2012-12-11 |
| 8243273 | Enhanced OVL dummy field enabling “on-the-fly” OVL measurement methods | Vladimir Levinski, Michael Adel, Alexander Svizher | 2012-08-14 |
| 8138498 | Apparatus and methods for determining overlay of structures having rotational or mirror symmetry | — | 2012-03-20 |
| 8045786 | Waferless recipe optimization | Amir Widmann, Dror Francis | 2011-10-25 |
| 7933016 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanevsky, Michael Friedmann, Ian Smith +10 more | 2011-04-26 |
| 7879627 | Overlay marks and methods of manufacturing such marks | Michael Adel, Walter D. Mieher, Ady Levy, Dan Wack | 2011-02-01 |