Issued Patents All Time
Showing 76–79 of 79 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7068833 | Overlay marks, methods of overlay mark design and methods of overlay measurements | Michael Adel, Walter D. Mieher, Ady Levy, Dan Wack | 2006-06-27 |
| 6985618 | Overlay marks, methods of overlay mark design and methods of overlay measurements | Michael Adel, Walter D. Mieher | 2006-01-10 |
| 6928628 | Use of overlay diagnostics for enhanced automatic process control | Joel Seligson, John Robinson, Pavel Izikson, Michael Adel, Boris Simkin +1 more | 2005-08-09 |
| 6921916 | Overlay marks, methods of overlay mark design and methods of overlay measurements | Michael Adel | 2005-07-26 |