Issued Patents All Time
Showing 51–75 of 79 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7876438 | Apparatus and methods for determining overlay and uses of same | Michael Adel, Jorge Poplawski, Joel Seligson | 2011-01-25 |
| 7804994 | Overlay metrology and control method | Michael Adel, Elyakim Kassel, Boris Golovanevsky, John Robinson, Chris Mack +3 more | 2010-09-28 |
| 7684038 | Overlay metrology target | Vladimir Levinski | 2010-03-23 |
| 7663753 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanevsky, Michael Friedmann, Ian Smith +10 more | 2010-02-16 |
| 7608468 | Apparatus and methods for determining overlay and uses of same | Michael Adel, Jorge Poplawski, Joel Seligson | 2009-10-27 |
| 7557921 | Apparatus and methods for optically monitoring the fidelity of patterns produced by photolitographic tools | Michael Adel, Moshe E. Preil, Kevin P. Monahan, Christopher F. Bevis, Ben-ming Benjamin Tsai | 2009-07-07 |
| 7541201 | Apparatus and methods for determining overlay of structures having rotational or mirror symmetry | — | 2009-06-02 |
| 7433040 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanesky, Michael Friedmann, Ian Smith +3 more | 2008-10-07 |
| 7385699 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanesky, Michael Friedmann, Ian Smith +3 more | 2008-06-10 |
| 7379183 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanesky, Michael Friedmann, Ian Smith +6 more | 2008-05-27 |
| 7368208 | Measuring phase errors on phase shift masks | Michael Adel, Chris Mack | 2008-05-06 |
| 7355291 | Overlay marks, methods of overlay mark design and methods of overlay measurements | Michael Adel | 2008-04-08 |
| 7346878 | Apparatus and methods for providing in-chip microtargets for metrology or inspection | Avi Cohen, Michael Adel | 2008-03-18 |
| 7317824 | Overlay marks, methods of overlay mark design and methods of overlay measurements | Michael Adel, Walter D. Mieher, Ady Levy, Dan Wack | 2008-01-08 |
| 7317531 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanesky, Michael Friedmann, Ian Smith +10 more | 2008-01-08 |
| 7310789 | Use of overlay diagnostics for enhanced automatic process control | Joel Seligson, John Robinson, Pavel Izikson, Michael Adel, Boris Simkin +2 more | 2007-12-18 |
| 7301634 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanesky, Michael Friedmann, Ian Smith +7 more | 2007-11-27 |
| 7298481 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanevsky, Michael Friedmann, Ian Smith +4 more | 2007-11-20 |
| 7280212 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanesky, Michael Friedmann, Ian Smith +3 more | 2007-10-09 |
| 7274814 | Overlay marks, methods of overlay mark design and methods of overlay measurements | Michael Adel, Walter D. Mieher, Ady Levy, Dan Wack | 2007-09-25 |
| 7242477 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanesky, Michael Friedmann, Ian Smith +4 more | 2007-07-10 |
| 7181057 | Overlay marks, methods of overlay mark design and methods of overlay measurements | Michael Adel, Walter D. Mieher, Ady Levy, Dan Wack | 2007-02-20 |
| 7177457 | Overlay marks, methods of overlay mark design and methods of overlay measurements | Michael Adel, Walter D. Mieher | 2007-02-13 |
| 7111256 | Use of overlay diagnostics for enhanced automatic process control | Joel Seligson, John Robinson, Pavel Izikson, Michael Adel, Boris Simkin +2 more | 2006-09-19 |
| 7075639 | Method and mark for metrology of phase errors on phase shift masks | Michael Adel, Chris Mack | 2006-07-11 |