Issued Patents All Time
Showing 25 most recent of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148660 | Low resistance and high reliability metallization module | Suketu Arun Parikh, Feng Chen, Lu Chen | 2024-11-19 |
| 12043895 | Methods of using a segmented showerhead for uniform delivery of multiple pre-cursors | Alexander Lerner, Prashanth Kothnur, Satish Radhakrishnan | 2024-07-23 |
| 11970775 | Showerhead for providing multiple materials to a process chamber | Prashanth Kothnur, Satish Radhakrishnan, Alexander Lerner, Sergei Klimovich | 2024-04-30 |
| 11948885 | Methods and apparatus for forming dual metal interconnects | Suketu Arun Parikh, Rong Tao, Joung Joo Lee, Seshadri Ganguli, Shirish A. PETHE +3 more | 2024-04-02 |
| 11834743 | Segmented showerhead for uniform delivery of multiple precursors | Alexander Lerner, Prashanth Kothnur, Satish Radhakrishnan | 2023-12-05 |
| 11692261 | Evaporator chamber for forming films on substrates | Alexander Lerner, Satish Radhakrishnan | 2023-07-04 |
| 11637004 | Alignment module with a cleaning chamber | Alexander Lerner, Michael P. Karazim, Andrew J. Constant, Jeffrey A. Brodine, Kim Vellore +1 more | 2023-04-25 |
| 11538706 | System and method for aligning a mask with a substrate | Alexander Lerner, Michael P. Karazim, Andrew J. Constant, Jeffrey A. Brodine, Kim Vellore +1 more | 2022-12-27 |
| 11505863 | Methods for forming films on substrates | Alexander Lerner, Prashanth Kothnur, Satish Radhakrishnan, Xiaozhou Che | 2022-11-22 |
| 11414740 | Processing system for forming layers | Alexander Lerner, Michael P. Karazim, Kevin Moraes, Steven V. Sansoni, Andrew J. Constant +4 more | 2022-08-16 |
| 11393703 | Apparatus and method for controlling a flow process material to a deposition chamber | Alexander Lerner, Phillip Stout, Joseph M. Ranish, Prashanth Kothnur, Satish Radhakrishnan | 2022-07-19 |
| 11118278 | Enhanced plating bath and additive chemistries for cobalt plating | Ismail Emesh, Chris Pabelico | 2021-09-14 |
| 11075165 | Methods and apparatus for forming dual metal interconnects | Suketu Arun Parikh, Rong Tao, Joung Joo Lee, Seshadri Ganguli, Shirish A. PETHE +3 more | 2021-07-27 |
| 11056277 | Magnetized substrate carrier apparatus with shadow mask for deposition | Daniel Lee Diehl, Alexander Lerner | 2021-07-06 |
| 11047039 | Substrate carrier having hard mask | Alexander Lerner, Kim Vellore, Ami Sade, Steven V. Sansoni, Andrew J. Constant +4 more | 2021-06-29 |
| 11024537 | Methods and apparatus for hybrid feature metallization | Ismail Emesh, Xikun Wang | 2021-06-01 |
| 10950500 | Methods and apparatus for filling a feature disposed in a substrate | Xikun Wang, Ismail Emesh, Jianxin Lei, Wenting Hou | 2021-03-16 |
| 10770346 | Selective cobalt removal for bottom up gapfill | Xikun Wang, Jianxin Lei, Nitin K. Ingle | 2020-09-08 |
| 10636655 | Methods for asymmetric deposition of metal on high aspect ratio nanostructures | Ben-Li Sheu, Bencherki Mebarki, Joung Joo Lee, Ismail Emesh, Xianmin Tang | 2020-04-28 |
| 10622252 | Co or Ni and Cu integration for small and large features in integrated circuits | Ismail Emesh | 2020-04-14 |
| 10487410 | Enhanced plating bath and additive chemistries for cobalt plating | Ismail Emesh, Chris Pabelico | 2019-11-26 |
| 10163696 | Selective cobalt removal for bottom up gapfill | Xikun Wang, Jianxin Lei, Nitin K. Ingle | 2018-12-25 |
| 10081881 | Electroplating apparatus with membrane tube shield | Paul R. McHugh, Gregory J. Wilson | 2018-09-25 |
| 10062607 | Methods for producing interconnects in semiconductor devices | Ismail Emesh, Mehul Naik | 2018-08-28 |
| 10000860 | Methods of electrochemical deposition for void-free gap fill | Serdar Aksu, Jung Gu Lee, Bart Sakry | 2018-06-19 |