Issued Patents All Time
Showing 1–25 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400904 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2025-08-26 |
| 12371776 | Overlap susceptor and preheat ring | Zhepeng CONG, Schubert S. Chu, Kartik Shah, Zhiyuan Ye, Richard O. Collins | 2025-07-29 |
| 12170213 | Flat pocket susceptor design with improved heat transfer | Zhepeng CONG | 2024-12-17 |
| 12163229 | Multi zone spot heating in EPI | Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye +3 more | 2024-12-10 |
| 12077880 | In-situ film growth rate monitoring apparatus, systems, and methods for substrate processing | Zhepeng CONG, Tao SHENG, Yong-Ping Zheng | 2024-09-03 |
| 12037701 | Multi-thermal CVD chambers with shared gas delivery and exhaust system | Zhiyuan Ye, Shu-Kwan LAU, Brian H. Burrows, Lori D. Washington, Herman Diniz +4 more | 2024-07-16 |
| 11996307 | Semiconductor processing tool platform configuration with reduced footprint | Nir Merry, Schubert S. Chu, Sushant S. Koshti, Michael Kuchar, Songjae Lee | 2024-05-28 |
| 11848226 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2023-12-19 |
| 11821088 | Multi zone spot heating in EPI | Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye +3 more | 2023-11-21 |
| 11815401 | Temperature calibration with band gap absorption method | Zhepeng CONG, Schubert S. Chu | 2023-11-14 |
| 11807931 | Chamber injector | Shu-Kwan LAU, Lit Ping LAM, Preetham Rao, Kartik Shah, Ian Ong +1 more | 2023-11-07 |
| 11781212 | Overlap susceptor and preheat ring | Zhepeng CONG, Schubert S. Chu, Kartik Shah, Zhiyuan Ye, Richard O. Collins | 2023-10-10 |
| 11492704 | Chamber injector | Shu-Kwan LAU, Lit Ping LAM, Preetham Rao, Kartik Shah, Ian Ong +1 more | 2022-11-08 |
| 11359972 | Temperature calibration with band gap absorption method | Zhepeng CONG, Schubert S. Chu | 2022-06-14 |
| 11177144 | Wafer spot heating with beam width modulation | Shu-Kwan LAU, Zhiyuan Ye, Zuoming ZHU, Koji Nakanishi, Toshiyuki Nakagawa +1 more | 2021-11-16 |
| 11171023 | Diode laser for wafer heating for EPI processes | Schubert S. Chu, Douglas E. Holmgren, Kartik Shah, Palamurali GAJENDRA, Preetham Rao +5 more | 2021-11-09 |
| 11021790 | Liner for processing chamber | Zhepeng CONG, Schubert S. Chu, Kartik Shah, Surajit Kumar | 2021-06-01 |
| 11021795 | Multi zone spot heating in epi | Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye +3 more | 2021-06-01 |
| 10930543 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2021-02-23 |
| 10770319 | EPI thickness tuning by pulse or profile spot heating | Shu-Kwan LAU, Zhiyuan Ye, Zuoming ZHU, Errol Antonio C. Sanchez, Schubert S. Chu | 2020-09-08 |
| 10731272 | Methods and apparatus for deposition processes | Kevin Joseph Bautista, Zhiyuan Ye, Schubert S. Chu, Yihwan Kim | 2020-08-04 |
| 10519547 | Susceptor design to eliminate deposition valleys in the wafer | Karthik Ramanathan, Kartik Shah, Schubert S. Chu, Jeffrey Tobin, Errol Antonio C. Sanchez +1 more | 2019-12-31 |
| 10269614 | Susceptor design to reduce edge thermal peak | Schubert S. Chu, Kartik Shah, Anhthu Ngo, Karthik Ramanathan, Nitin Pathak +8 more | 2019-04-23 |
| 10260164 | Methods and apparatus for deposition processes | Kevin Joseph Bautista, Zhiyuan Ye, Schubert S. Chu, Yihwan Kim | 2019-04-16 |
| 10074555 | Non-contact substrate processing | Blake Koelmel | 2018-09-11 |