Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837448 | High-temperature chamber and chamber component cleaning and maintenance method and apparatus | Shuran Sheng, Lin Zhang, Jiyong Huang, Jang Seok OH, Joseph C. Werner +4 more | 2023-12-05 |
| 10770321 | Process kit erosion and service life prediction | Kang-Lie Chiang, Greg Blackburn, Pallavi Zhang, Michael D. Armacost | 2020-09-08 |
| 10177018 | Process kit erosion and service life prediction | Kang-Lie Chiang, Greg Blackburn, Pallavi Zhang, Michael D. Armacost | 2019-01-08 |
| 6908865 | Method and apparatus for cleaning substrates | Martin Kranz, Srinivas Guggilla, Suraj Rengarajan, Mei Chang, Gongda Yao +1 more | 2005-06-21 |
| 6436819 | Nitrogen treatment of a metal nitride/metal stack | Zhi ZHANG, David Pung, Hong Mei Zhang, Roderick C. Mosely | 2002-08-20 |
| 6433314 | Direct temperature control for a component of a substrate processing chamber | Tushar Mandrekar, Anish Tolia | 2002-08-13 |
| 6395157 | Method and apparatus for sputter etch conditioning a ceramic body | Vince Burkhart, Steve Sansoni, Vijay D. Parkhe, Eugene Tzou | 2002-05-28 |
| 6358810 | Method for superior step coverage and interface control for high K dielectric capacitors and related electrodes | Charles Dornfest, John C. Egermeier | 2002-03-19 |
| 6350320 | Heater for processing chamber | Semyon Sherstinsky, Alison Gilliam, Paul Smith, Leonel A. Zuniga, Ted G. Yoshidome +4 more | 2002-02-26 |
| 6345642 | Method and apparatus for removing processing liquid from a processing liquid path | Ted G. Yoshidome, Tushar Mandrekar, Anish Tolia | 2002-02-12 |
| 6190037 | Non-intrusive, on-the-fly (OTF) temperature measurement and monitoring system | Ashok Das, Nety M. Krishna, Marc Schweitzer, Nalin Patadia, Wei Yang +3 more | 2001-02-20 |
| 6117245 | Method and apparatus for controlling cooling and heating fluids for a gas distribution plate | Tushar Mandrekar, Anish Tolia | 2000-09-12 |
| 5972178 | Continuous process for forming improved titanium nitride barrier layers | Murali Narasimhan, Kenny King-Tai Ngan, Bradley O. Stimson | 1999-10-26 |
| 5956608 | Modulating surface morphology of barrier layers | Ted Guo | 1999-09-21 |
| 5861086 | Method and apparatus for sputter etch conditioning a ceramic body | Vince Burkhart, Steve Sansoni, Vijay D. Parkhe, Eugene Tzou | 1999-01-19 |
| 5650052 | Variable cell size collimator | Sergio Edelstein, Keiji Miyamoto, Roderick C. Mosely, William J. Murphy, Vijay D. Parkhe +2 more | 1997-07-22 |