Issued Patents All Time
Showing 25 most recent of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11348222 | Methods and systems for inspection of wafers and reticles using designer intent data | Paul Frank Marella, Sharon McCauley, William Volk, James Wiley, Sterling Watson +2 more | 2022-05-31 |
| 11295438 | Method and system for mixed mode wafer inspection | Jason Z. Lin, Allen Park, Richard Wallingford, Songnian Rong, Chetana Bhaskar | 2022-04-05 |
| 10713771 | Methods and systems for inspection of wafers and reticles using designer intent data | Paul Frank Marella, Sharon McCauley, William Volk, James Wiley, Sterling Watson +2 more | 2020-07-14 |
| 10387608 | Metrology target identification, design and verification | Michael Adel, Tal Shusterman, Chen Dror | 2019-08-20 |
| 10192303 | Method and system for mixed mode wafer inspection | Jason Z. Lin, Allen Park, Richard Wallingford, Songnian Rong, Chetana Bhaskar | 2019-01-29 |
| 9910953 | Metrology target identification, design and verification | Michael Adel, Tal Shusterman, Chen Dror | 2018-03-06 |
| 9659670 | Computer-implemented methods, computer-readable media, and systems for classifying defects detected in a memory device area on a wafer | SunYong Choi, YeonHo Pae | 2017-05-23 |
| 9576861 | Method and system for universal target based inspection and metrology | Allen Park, Michael Adel, Kris Bhaskar, Ady Levy, Amir Widmann +2 more | 2017-02-21 |
| 9518932 | Metrology optimized inspection | Allen Park, Craig MacNaughton | 2016-12-13 |
| 9401014 | Methods and systems for utilizing design data in combination with inspection data | Khurram Zafar, Sagar A. Kekare, Allen Park, Peter Rose | 2016-07-26 |
| 9170209 | Inspection guided overlay metrology | Amir Widmann, Allen Park | 2015-10-27 |
| 9151712 | Rule checking for metrology and inspection | Michael Adel | 2015-10-06 |
| 9087367 | Determining design coordinates for wafer defects | Michael J. Van Riet, Allen Park, Khurram Zafar, Santosh Bhattacharyya | 2015-07-21 |
| 9002497 | Methods and systems for inspection of wafers and reticles using designer intent data | William Volk, James Wiley, Sterling Watson, Sagar A. Kekare, Carl Hess +2 more | 2015-04-07 |
| 8989479 | Region based virtual fourier filter | Lisheng Gao, Kenong Wu, Allen Park, Khurram Zafar, Junqing Huang +5 more | 2015-03-24 |
| 8948495 | Inspecting a wafer and/or predicting one or more characteristics of a device being formed on a wafer | Gino Marcuccilli, Amir Widmann, John Robinson, Allen Park | 2015-02-03 |
| 8923600 | Methods and systems for utilizing design data in combination with inspection data | Khurram Zafar, Sagar A. Kekare, Allen Park, Peter Rose | 2014-12-30 |
| 8826200 | Alteration for wafer inspection | Allen Park | 2014-09-02 |
| 8594823 | Scanner performance comparison and matching using design and defect data | Allen Park, Masami Aoki, Chris Chih-Chien Young, Martin Plihal, Michael J. Van Riet | 2013-11-26 |
| 8559001 | Inspection guided overlay metrology | Amir Widmann, Allen Park | 2013-10-15 |
| 8194968 | Methods and systems for using electrical information for a device being fabricated on a wafer to perform one or more defect-related functions | Allen Park, Peter Rose, Brian Duffy, Mark A. McCord, Gordon Abbott | 2012-06-05 |
| 8139844 | Methods and systems for determining a defect criticality index for defects on wafers | Chien-Huei Chen, Yan Xiong, Jianxin Zhang, Tsung-Pao Fang | 2012-03-20 |
| 7904845 | Determining locations on a wafer to be reviewed during defect review | Christophe David Fouquet, Gordon Abbott, Zain Saidin | 2011-03-08 |
| 7711514 | Computer-implemented methods, carrier media, and systems for generating a metrology sampling plan | Allen Park | 2010-05-04 |
| 7570796 | Methods and systems for utilizing design data in combination with inspection data | Khurram Zafar, Sagar A. Kekare, Allen Park, Peter Rose | 2009-08-04 |