Issued Patents All Time
Showing 25 most recent of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10236182 | Conformal amorphous carbon for spacer and spacer protection applications | Sungjin Kim, Deenesh Padhi, Sung Hyun Hong, Bok Hoen Kim | 2019-03-19 |
| 10074534 | Ultra-conformal carbon film deposition | Swayambhu Prasad Behera, Shahid Shaikh, Pramit Manna, Mandar B. Pandit, Tersem Summan +4 more | 2018-09-11 |
| 9984868 | PEALD of films comprising silicon nitride | Victor Nguyen, Woong Jae Lee, Mihaela Balseanu, Li-Qun Xia | 2018-05-29 |
| 9721784 | Ultra-conformal carbon film deposition | Swayambhu Prasad Behera, Shahid Shaikh, Pramit Manna, Mandar B. Pandit, Tersem Summan +4 more | 2017-08-01 |
| 9570303 | Conformal amorphous carbon for spacer and spacer protection applications | Sungjin Kim, Deenesh Padhi, Sung Hyun Hong, Bok Hoen Kim | 2017-02-14 |
| 9337072 | Apparatus and method for substrate clamping in a plasma chamber | Ganesh Balasubramanian, Amit Kumar BANSAL, Eller Y. Juco, Mohamad A. Ayoub, Hyung Joon Kim +11 more | 2016-05-10 |
| 8758638 | Copper oxide removal techniques | Weifeng YE, Victor Nguyen, Mei-Yee Shek, Mihaela Balseanu, Li-Qun Xia | 2014-06-24 |
| 8679987 | Deposition of an amorphous carbon layer with high film density and high etch selectivity | Patrick Reilly, Shahid Shaikh, Tersem Summan, Deenesh Padhi, Sanjeev Baluja +3 more | 2014-03-25 |
| 8598020 | Plasma-enhanced chemical vapor deposition of crystalline germanium | Victor Nguyen, Mihaela Balseanu, Li-Qun Xia | 2013-12-03 |
| 8586487 | Low temperature plasma enhanced chemical vapor deposition of conformal silicon carbon nitride and silicon nitride films | Victor Nguyen, Mihaela Balseanu, Li-Qun Xia | 2013-11-19 |
| 8563090 | Boron film interface engineering | Mihaela Balseanu, Li-Qun Xia, Yi-Hsing Chen | 2013-10-22 |
| 8501568 | Method of forming flash memory with ultraviolet treatment | Mihaela Balseanu, Vladimir Zubkov, Li-Qun Xia, Atif Noori, Reza Arghavani +1 more | 2013-08-06 |
| 8445075 | Method to minimize wet etch undercuts and provide pore sealing of extreme low k (k<2.5) dielectrics | Huiwen Xu, Mei-Yee Shek, Li-Qun Xia, Amir Al-Bayati, Hichem M'Saad | 2013-05-21 |
| 8389376 | Air gap integration scheme | Alexandros T. Demos, Li-Qun Xia, Bok Hoen Kim, Hichem M'Saad | 2013-03-05 |
| 8343881 | Silicon dioxide layer deposited with BDEAS | Yong Won Lee, Vladimir Zubkov, Mei-Yee Shek, Li-Qun Xia, Prahallad Iyengar +4 more | 2013-01-01 |
| 8337950 | Method for depositing boron-rich films for lithographic mask applications | Victor Nguyen, Yi-Hsing Chen, Mihaela Balseanu, Isabelita Roflox, Li-Qun Xia | 2012-12-25 |
| 8282734 | Methods to improve the in-film defectivity of PECVD amorphous carbon films | Deenesh Padhi, Chiu Chan, Sudha Rathi, Ganesh Balasubramanian, Jianhua Zhou +4 more | 2012-10-09 |
| 8252653 | Method of forming a non-volatile memory having a silicon nitride charge trap layer | Mihaela Balseanu, Vladimir Zubkov, Li-Qun Xia, Atif Noori, Reza Arghavani +1 more | 2012-08-28 |
| 8148269 | Boron nitride and boron-nitride derived materials deposition method | Mihaela Balseanu, Christopher Dennis Bencher, Yongmei Chen, Li Yan Miao, Victor Nguyen +2 more | 2012-04-03 |
| 8138104 | Method to increase silicon nitride tensile stress using nitrogen plasma in-situ treatment and ex-situ UV cure | Mihaela Balseanu, Victor Nguyen, Li-Qun Xia, Hichem M'Saad, Mei-Yee Shek +1 more | 2012-03-20 |
| 8084105 | Method of depositing boron nitride and boron nitride-derived materials | Jeong-Uk Huh, Mihaela Balseanu, Li-Qun Xia, Victor Nguyen, Hichem M'Saad | 2011-12-27 |
| 7964442 | Methods to obtain low k dielectric barrier with superior etch resistivity | Huiwen Xu, Yijun Liu, Li-Qun Xia, Hichem M'Saad | 2011-06-21 |
| 7871926 | Methods and systems for forming at least one dielectric layer | Li-Qun Xia, Mihaela Balseanu, Victor Nguyen, Hichem M'Saad, Haichun Yang +3 more | 2011-01-18 |
| 7867578 | Method for depositing an amorphous carbon film with improved density and step coverage | Deenesh Padhi, Hyoung-Chan Ha, Sudha Rathi, Chiu Chan, Sohyun Park +6 more | 2011-01-11 |
| 7816205 | Method of forming non-volatile memory having charge trap layer with compositional gradient | Mihaela Balseanu, Vladimir Zubkov, Li-Qun Xia, Atif Noori, Reza Arghavani +1 more | 2010-10-19 |