| 11715193 |
Color imaging for CMP monitoring |
Dominic J. Benvegnu, Robert D. Tolles, Boguslaw A. Swedek |
2023-08-01 |
| 11430680 |
Position and temperature monitoring of ALD platen susceptor |
Kevin Griffin, Joseph Yudovsky, Kaushal Gangakhedkar, Dmitry A. Dzilno, Alex Minkovich |
2022-08-30 |
| 11119051 |
Particle detection for substrate processing |
Todd Egan, Mehdi Vaez-Iravani, Samer Banna, Kyle Tantiwong, Gregory L. Kirk +1 more |
2021-09-14 |
| 10845317 |
Particle detection for substrate processing |
Todd Egan, Mehdi Vaez-Iravani, Samer Banna, Kyle Tantiwong, Gregory L. Kirk +1 more |
2020-11-24 |
| 10565701 |
Color imaging for CMP monitoring |
Dominic J. Benvegnu, Robert D. Tolles, Boguslaw A. Swedek |
2020-02-18 |
| 10312120 |
Position and temperature monitoring of ALD platen susceptor |
Kevin Griffin, Joseph Yudovsky, Kaushal Gangakhedkar, Dmitry A. Dzilno, Alex Minkovich |
2019-06-04 |
| 10260855 |
Electroplating tool with feedback of metal thickness distribution and correction |
Todd Egan, Edward W. Budiarto, Robert O. Miller, Bridger Earl HOERNER, Robert W. Batz, Jr. +1 more |
2019-04-16 |
| 10196741 |
Wafer placement and gap control optimization through in situ feedback |
Kevin Griffin, Alex Minkovich, Somesh Khandelwal, Joseph Yudovsky, Todd Egan |
2019-02-05 |
| 9880233 |
Methods and apparatus to determine parameters in metal-containing films |
— |
2018-01-30 |
| 9631919 |
Non-contact sheet resistance measurement of barrier and/or seed layers prior to electroplating |
Dmitry A. Dzilno, Todd Egan, Robert O. Miller |
2017-04-25 |
| 9490154 |
Method of aligning substrate-scale mask with substrate |
Todd Egan, Paul Connors, Sergey Starik, Ganesh Balasubramanian |
2016-11-08 |
| 9405287 |
Apparatus and method for optical calibration of wafer placement by a robot |
Todd Egan, Eran Weiss, Michael R. Rice, Izya Kremerman |
2016-08-02 |
| 8698889 |
Metrology system for imaging workpiece surfaces at high robot transfer speeds |
Todd Egan, Karen Lingel, Mitchell DiSanto, Hari Kishore Ambal, Edward W. Budiarto |
2014-04-15 |
| 8639377 |
Metrology for GST film thickness and phase |
Kun Xu, Feng Q. Liu, Yuchun Wang, Wen-Chiang Tu |
2014-01-28 |
| 8620064 |
Method for imaging workpiece surfaces at high robot transfer speeds with reduction or prevention of motion-induced distortion |
Todd Egan, Karen Lingel |
2013-12-31 |
| 8452077 |
Method for imaging workpiece surfaces at high robot transfer speeds with correction of motion-induced distortion |
Todd Egan, Karen Lingel |
2013-05-28 |
| 8125654 |
Methods and apparatus for measuring substrate edge thickness during polishing |
Dominic J. Benvegnu, Boguslaw A. Swedek, Sen-Hou Ko, Paul V. Miller |
2012-02-28 |
| 8014004 |
Determining physical property of substrate |
Boguslaw A. Swedek, Jeffrey Drue David, Jun Qian, Ingemar Carlsson, Dominic J. Benvegnu +2 more |
2011-09-06 |
| 7952708 |
High throughput measurement system |
Boguslaw A. Swedek, Dominic J. Benvegnu, Jeffrey Drue David, Jun Qian, Sidney P. Huey +3 more |
2011-05-31 |
| 7840375 |
Methods and apparatus for generating a library of spectra |
Boguslaw A. Swedek, Dominic J. Benvegnu, Jeffrey Drue David, Jun Qian, Sidney P. Huey +3 more |
2010-11-23 |
| 7746485 |
Determining physical property of substrate |
Boguslaw A. Swedek, Jeffrey Drue David, Jun Qian, Ingemar Carlsson, Dominic J. Benvegnu +2 more |
2010-06-29 |
| 7444198 |
Determining physical property of substrate |
Boguslaw A. Swedek, Jeffrey Drue David, Jun Qian, Ingemar Carlsson, Dominic J. Benvegnu +2 more |
2008-10-28 |
