Issued Patents All Time
Showing 76–100 of 172 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8772941 | Circuit structure with low dielectric constant regions | Lawrence A. Clevenger, Louis C. Hsu, Wai-Kin Li | 2014-07-08 |
| 8721952 | Pneumatic method and apparatus for nano imprint lithography having a conforming mask | Yves Martin, Theodore G. van Kessel, Hematha K. Wickramasinghe | 2014-05-13 |
| 8715917 | Simultaneous photoresist development and neutral polymer layer formation | Steven J. Holmes, Jassem A. Abdallah, Joy Cheng, Chi-Chun Liu | 2014-05-06 |
| 8623458 | Methods of directed self-assembly, and layered structures formed therefrom | Joy Cheng, Stefan Harrer, William D. Hinsberg, Steven J. Holmes, Ho-Cheol Kim +1 more | 2014-01-07 |
| 8609238 | Method and material for a thermally crosslinkable random copolymer | Gregory Breyta | 2013-12-17 |
| 8536031 | Method of fabricating dual damascene structures using a multilevel multiple exposure patterning scheme | John C. Arnold, Kuang-Jung Chen, Dario L. Goldfarb, Stefan Harrer, Steven J. Holmes +1 more | 2013-09-17 |
| 8513769 | Electrical fuses and resistors having sublithographic dimensions | Charles T. Black, Timothy J. Dalton, Daniel C. Edelstein, Wai-Kin Li, Anthony K. Stamper +1 more | 2013-08-20 |
| 8507346 | Method of forming a semiconductor device having a cut-way hole to expose a portion of a hardmask layer | Martin Burkhardt, Allen H. Gabor, Oleg Gluschenkov, Scott D. Halle, Howard S. Landis +1 more | 2013-08-13 |
| 8491987 | Selectively coated self-aligned mask | Stephen M. Gates, Jeffrey Hedrick, Elbert E. Huang, Satyanarayana V. Nitta, Sampath Purushothaman +1 more | 2013-07-23 |
| 8470711 | Tone inversion with partial underlayer etch for semiconductor device formation | John C. Arnold, Sean D. Burns, Steven J. Holmes, Yunpeng Yin | 2013-06-25 |
| 8435884 | Method for forming an interconnect structure | Ryoung-Han Kim | 2013-05-07 |
| 8361704 | Method for reducing tip-to-tip spacing between lines | Wai-Kin Li, Haining Yang | 2013-01-29 |
| 8358011 | Interconnect structures with engineered dielectrics with nanocolumnar porosity | Satya V. Nitta, Sampath Purushothaman, Charles T. Black, Kathryn Guarini | 2013-01-22 |
| 8343868 | Device and methodology for reducing effective dielectric constant in semiconductor devices | Daniel C. Edelstein, Edward C. Cooney, III, Timothy J. Dalton, John A. Fitzsimmons, Jeffrey P. Gambino +10 more | 2013-01-01 |
| 8338952 | Interconnect structures with ternary patterned features generated from two lithographic processes | Elbert E. Huang, Satyanarayana V. Nitta, Sampath Purushothaman | 2012-12-25 |
| 8334088 | Functionalized carbosilane polymers and photoresist compositions containing the same | Robert David Allen, Daniel P. Sanders, Ratnam Sooriyakumaran, Hoa D. Truong | 2012-12-18 |
| 8298954 | Sidewall image transfer process employing a cap material layer for a metal nitride layer | John C. Arnold, Sean D. Burns, David V. Horak, Yunpeng Yin | 2012-10-30 |
| 8137996 | Method and system for tone inverting of residual layer tolerant imprint lithography | Theodore G. van Kessel, Yves Martin, Dirk Pfeiffer | 2012-03-20 |
| 8137893 | Chemical trim of photoresist lines by means of a tuned overcoat | Sean D. Burns, Steven J. Holmes, Wu-Song Huang | 2012-03-20 |
| 8137997 | Method and system for tone inverting of residual layer tolerant imprint lithography | Theodore G. van Kessel, Yves Martin, Dirk Pfeiffer | 2012-03-20 |
| 8129286 | Reducing effective dielectric constant in semiconductor devices | Daniel C. Edelstein, Edward C. Cooney, III, Timothy J. Dalton, John A. Fitzsimmons, Jeffrey P. Gambino +10 more | 2012-03-06 |
| 8119531 | Mask and etch process for pattern assembly | John C. Arnold, Sean D. Burns, Yunpeng Yin | 2012-02-21 |
| 8119322 | Method for producing self-aligned mask, articles produced by same and composition for same | Timothy A. Brunner, Elbert E. Huang, Muthumanickam Sankarapandian | 2012-02-21 |
| 8053368 | Method for removing residues from a patterned substrate | Sean D. Burns, Steven J. Holmes | 2011-11-08 |
| 8039203 | Integrated circuits and methods of design and manufacture thereof | Helen Wang, Scott D. Halle, Henning Haffner, Haoren Zhuang, Klaus Herold +4 more | 2011-10-18 |