| 8721952 |
Pneumatic method and apparatus for nano imprint lithography having a conforming mask |
Matthew E. Colburn, Yves Martin, Theodore G. van Kessel |
2014-05-13 |
| 7883832 |
Method and apparatus for direct referencing of top surface of workpiece during imprint lithography |
Matthew E. Colburn, Yves Martin, Theodore G. van Kessel |
2011-02-08 |
| 7776709 |
Cut-and-paste imprint lithographic mold and method therefor |
Matthew E. Colburn, Yves Martin, Theodore G. van Kessel |
2010-08-17 |
| 7344955 |
Cut-and-paste imprint lithographic mold and method therefor |
Matthew E. Colburn, Yves Martin, Theodore G. van Kessel |
2008-03-18 |
| 7130038 |
Method and apparatus for optical film measurements in a controlled environment |
Richard J. Lebel, Fredrik Maurer, Paul Smith, Theodore G. van Kessel |
2006-10-31 |
| 6967715 |
Method and apparatus for optical film measurements in a controlled environment |
Richard J. Lebel, Fredrik Maurer, Paul Smith, Theodore G. van Kessel |
2005-11-22 |
| 6738142 |
Integrated wafer cassette metrology assembly |
Theodore G. van Kessel, Richard J. Lebel |
2004-05-18 |
