Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8721952 | Pneumatic method and apparatus for nano imprint lithography having a conforming mask | Matthew E. Colburn, Yves Martin, Theodore G. van Kessel | 2014-05-13 |
| 7883832 | Method and apparatus for direct referencing of top surface of workpiece during imprint lithography | Matthew E. Colburn, Yves Martin, Theodore G. van Kessel | 2011-02-08 |
| 7776709 | Cut-and-paste imprint lithographic mold and method therefor | Matthew E. Colburn, Yves Martin, Theodore G. van Kessel | 2010-08-17 |
| 7344955 | Cut-and-paste imprint lithographic mold and method therefor | Matthew E. Colburn, Yves Martin, Theodore G. van Kessel | 2008-03-18 |
| 7130038 | Method and apparatus for optical film measurements in a controlled environment | Richard J. Lebel, Fredrik Maurer, Paul Smith, Theodore G. van Kessel | 2006-10-31 |
| 6967715 | Method and apparatus for optical film measurements in a controlled environment | Richard J. Lebel, Fredrik Maurer, Paul Smith, Theodore G. van Kessel | 2005-11-22 |
| 6738142 | Integrated wafer cassette metrology assembly | Theodore G. van Kessel, Richard J. Lebel | 2004-05-18 |