Issued Patents All Time
Showing 76–100 of 117 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8129286 | Reducing effective dielectric constant in semiconductor devices | Daniel C. Edelstein, Matthew E. Colburn, Edward C. Cooney, III, Timothy J. Dalton, John A. Fitzsimmons +10 more | 2012-03-06 |
| 8119322 | Method for producing self-aligned mask, articles produced by same and composition for same | Timothy A. Brunner, Matthew E. Colburn, Muthumanickam Sankarapandian | 2012-02-21 |
| 8114769 | Methods and structures to enable self-aligned via etch for Cu damascene structure using trench first metal hard mask (TFMHM) scheme | Ravi Prakash Srivastava | 2012-02-14 |
| 8030202 | Temporary etchable liner for forming air gap | David V. Horak, Charles W. Koburger, III, Shom Ponoth | 2011-10-04 |
| 7993817 | Structure with self aligned resist layer on an insulating surface and method of making same | Daniel C. Edelstein, Robert D. Miller | 2011-08-09 |
| 7989291 | Anisotropic stress generation by stress-generating liners having a sublithographic width | Lawrence A. Clevenger, Bruce B. Doris, Sampath Purushothaman, Carl Radens | 2011-08-02 |
| 7951705 | Multilayered cap barrier in microelectronic interconnect structures | Jeffrey Hedrick | 2011-05-31 |
| 7948051 | Nonlithographic method to produce self-aligned mask, articles produced by same and compositions for same | Matthew E. Colburn, Stephen M. Gates, Jeffrey Hedrick, Satyanarayana V. Nitta, Sampath Purushothaman +1 more | 2011-05-24 |
| 7943480 | Sub-lithographic dimensioned air gap formation and related structure | Daniel C. Edelstein, Nicholas C. M. Fuller, David V. Horak, Wai-Kin Li, Anthony D. Lisi +2 more | 2011-05-17 |
| 7892940 | Device and methodology for reducing effective dielectric constant in semiconductor devices | Daniel C. Edelstein, Matthew E. Colburn, Edward C. Cooney, III, Timothy J. Dalton, John A. Fitzsimmons +10 more | 2011-02-22 |
| 7879717 | Polycarbosilane buried etch stops in interconnect structures | Kaushik A. Kumar, Kelly Malone, Dirk Pfeiffer, Muthumanickam Sankarapandian, Christy S. Tyberg | 2011-02-01 |
| 7696542 | Anisotropic stress generation by stress-generating liners having a sublithographic width | Lawrence A. Clevenger, Bruce B. Doris, Sampath Purushothaman, Carl Radens | 2010-04-13 |
| 7678673 | Strengthening of a structure by infiltration | William Francis Landers, Michael Lane, Eric G. Liniger, Xiao Hu Liu, David L. Questad +1 more | 2010-03-16 |
| 7648820 | Antireflective hardmask and uses thereof | Katherina Babich, Arpan Mahorowala, David R. Medeiros, Dirk Pfeiffer, Karen Temple | 2010-01-19 |
| 7598169 | Method to remove beol sacrificial materials and chemical residues by irradiation | Qinghuang Lin, Christy S. Tyberg, Ronald A. DellaGuardia | 2009-10-06 |
| 7592685 | Device and methodology for reducing effective dielectric constant in semiconductor devices | Daniel C. Edelstein, Matthew E. Colburn, Edward C. Cooney, III, Timothy J. Dalton, John A. Fitzsimmons +10 more | 2009-09-22 |
| 7485341 | Nonlithographic method to produce masks by selective reaction, articles produced, and composition for same | Matthew E. Colburn, Stephen M. Gates, Jeffrey Hedrick, Satyanarayana V. Nitta, Sampath Purushothaman +1 more | 2009-02-03 |
| 7470597 | Method of fabricating a multilayered dielectric diffusion barrier layer | Jeffrey Hedrick | 2008-12-30 |
| 7405147 | Device and methodology for reducing effective dielectric constant in semiconductor devices | Daniel C. Edelstein, Matthew E. Colburn, Edward C. Cooney, III, Timothy J. Dalton, John A. Fitzsimmons +10 more | 2008-07-29 |
| 7396758 | Polycarbosilane buried etch stops in interconnect structures | Kaushik A. Kumar, Kelly Malone, Dirk Pfeiffer, Muthumanickam Sankarapandian, Christy S. Tyberg | 2008-07-08 |
| 7393776 | Method of forming closed air gap interconnects and structures formed thereby | Matthew E. Colburn, Timothy J. Dalton, Satya V. Nitta, Sampath Purushothaman, Katherine L. Saenger +2 more | 2008-07-01 |
| 7378738 | Method for producing self-aligned mask, articles produced by same and composition for same | Timothy A. Brunner, Matthew E. Colburn, Muthumanickam Sankarapandian | 2008-05-27 |
| 7365378 | MOSFET structure with ultra-low K spacer | Philip J. Oldiges, Ghavam G. Shahidi, Christy S. Tyberg, Xinlin Wang, Robert L. Wisnieff | 2008-04-29 |
| 7361991 | Closed air gap interconnect structure | Simon Karecki, Maheswaran Surendra, Satya V. Nitta, Sampath Purushothaman, Matthew E. Colburn +2 more | 2008-04-22 |
| 7326442 | Antireflective composition and process of making a lithographic structure | Katherina Babich, Sean D. Burns, Arpan Mahorowala, Dirk Pfeiffer, Karen Temple | 2008-02-05 |