Issued Patents All Time
Showing 101–117 of 117 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7309649 | Method of forming closed air gap interconnects and structures formed thereby | Simon Karecki, Timothy J. Dalton, Satya V. Nitta, Sampath Purushothaman, Katherine L. Saenger +2 more | 2007-12-18 |
| 7256146 | Method of forming a ceramic diffusion barrier layer | Stephan A. Cohen, Stephen M. Gates, Jeffrey Hedrick, Dirk Pfeiffer | 2007-08-14 |
| 7214603 | Method for fabricating interconnect structures with reduced plasma damage | Ronald A. DellaGuardia, Qinghuang Lin, Robert D. Miller | 2007-05-08 |
| 7187081 | Polycarbosilane buried etch stops in interconnect structures | Kaushik A. Kumar, Kelly Malone, Dirk Pfeiffer, Muthumanickam Sankarapandian, Christy S. Tyberg | 2007-03-06 |
| 7172849 | Antireflective hardmask and uses thereof | Katherina Babich, Arpan Mahorowala, David R. Medeiros, Dirk Pfeiffer, Karen Temple | 2007-02-06 |
| 7087982 | Nitrogen-containing polymers as porogens in the preparation of highly porous, low dielectric constant materials | Teddie Peregrino Magbitang, Robert D. Miller, Willi Volksen | 2006-08-08 |
| 7084479 | Line level air gaps | Shyng-Tsong Chen, Stefanie Chiras, Matthew E. Colburn, Timothy J. Dalton, Jeffrey Hedrick +9 more | 2006-08-01 |
| 7081673 | Multilayered cap barrier in microelectronic interconnect structures | Jeffrey Hedrick | 2006-07-25 |
| 6940173 | Interconnect structures incorporating low-k dielectric barrier films | Stephan A. Cohen, Stephen M. Gates, Jeffrey Hedrick, Dirk Pfeiffer | 2005-09-06 |
| 6929982 | Patterning layers comprised of spin-on ceramic films | Stephen M. Gates, Jeffrey Hedrick, Dirk Pfeiffer | 2005-08-16 |
| 6930034 | Robust ultra-low k interconnect structures using bridge-then-metallization fabrication sequence | Matthew E. Colburn, Satyanarayana V. Nitta, Sampath Purushothaman, Katherine L. Saenger | 2005-08-16 |
| 6911400 | Nonlithographic method to produce self-aligned mask, articles produced by same and compositions for same | Matthew E. Colburn, Stephen M. Gates, Jeffrey Hedrick, Satyanarayana V. Nitta, Sampath Purushothaman +1 more | 2005-06-28 |
| 6812551 | Defect-free dielectric coatings and preparation thereof using polymeric nitrogenous porogens | Craig J. Hawker, James L. Hedrick, Victor Yee-Way Lee, Teddie Peregrino Magbitang, David Mecerreyes +2 more | 2004-11-02 |
| 6803660 | Patterning layers comprised of spin-on ceramic films | Stephen M. Gates, Jeffrey Hedrick, Dirk Pfeiffer | 2004-10-12 |
| 6685983 | Defect-free dielectric coatings and preparation thereof using polymeric nitrogenous porogens | Craig J. Hawker, James L. Hedrick, Victor Yee-Way Lee, Teddie Peregrino Magbitang, David Mecerreyes +2 more | 2004-02-03 |
| 6670285 | Nitrogen-containing polymers as porogens in the preparation of highly porous, low dielectric constant materials | Craig J. Hawker, James L. Hedrick, Victor Yee-Way Lee, Teddie Peregrino Magbitang, Robert D. Miller +1 more | 2003-12-30 |
| 6641899 | Nonlithographic method to produce masks by selective reaction, articles produced, and composition for same | Matthew E. Colburn, Stephen M. Gates, Jeffrey Hedrick, Satyanarayana V. Nitta, Sampath Purushothaman +1 more | 2003-11-04 |