Issued Patents All Time
Showing 51–69 of 69 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9360770 | Method of determining focus corrections, lithographic processing cell and device manufacturing method | Arend Johannes Kisteman, Thomas Theeuwes, Antoine Gaston Marie Kiers | 2016-06-07 |
| 9329500 | Lithographic apparatus configured to reconstruct an aerial pattern and to compare the reconstructed aerial pattern with an aerial pattern detected by an image sensor | Frank Staals, Joeri Lof, Erik Roelof Loopstra, Bearrach Moest | 2016-05-03 |
| 9177219 | Method of calibrating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | Wouter Onno Pril, Thomas Theeuwes, Alexander Padiy | 2015-11-03 |
| 8975599 | Image sensor, lithographic apparatus comprising an image sensor and use of an image sensor in a lithographic apparatus | Frank Staals, Joeri Lof, Erik Roelof Loopstra, Bearrach Moest | 2015-03-10 |
| 8937705 | Lithographic apparatus and device manufacturing method with radiation beam inspection using moveable reflecting device | Hans Van Der Laan, Cassandra Owen, Todd Davis, Todd Hiar, Theodore Paxton | 2015-01-20 |
| 8237913 | Lithographic apparatus and method | Robert Kazinczi, Laurentius Cornelius De Winter | 2012-08-07 |
| 8174678 | Lithographic apparatus with adjusted exposure slit shape enabling reduction of focus errors due to substrate topology and device manufacturing method | Sven Gunnar Krister Magnusson, Martin Jules Marie-Emile De Nivelle, Frank Staals | 2012-05-08 |
| 7679715 | Lithographic processing cell, lithographic apparatus, track and device manufacturing method | Stefan Geerte Kruijswijk, Rard Willem De Leeuw, Paul Frank Luehrmann, Paul Jacques Van Wijnen, Kars Zeger Troost | 2010-03-16 |
| 7639345 | Lithographic apparatus | Joost Jeroen Ottens, Aschwin Lodewijk Hendricus Johannes Van Meer, Jacob Willem Vink, Rene Theodorus Petrus Compen, Petrus Johannes Gerrits | 2009-12-29 |
| 7626684 | Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus | Andre Bernardus Jeunink, M'hamed Akhssay, Johannes Jacobus Matheus Baselmans, Franciscus Antonius Chrysogonus Marie Commissaris, Simon De Groot +3 more | 2009-12-01 |
| 7580113 | Method of reducing a wave front aberration, and computer program product | Freerk Adriaan Stoffels, Laurentius Catrinus Jorritsma, Tammo Uitterdijk, Johannes Wilhelmus De Klerk | 2009-08-25 |
| 7511799 | Lithographic projection apparatus and a device manufacturing method | Johannes Wilhelmus De Klerk, Peter Hanzen Wardenier | 2009-03-31 |
| 7436485 | Lithographic apparatus, patterning assembly and contamination estimation method | — | 2008-10-14 |
| 7403259 | Lithographic processing cell, lithographic apparatus, track and device manufacturing method | Stefan Geerte Kruijswijk, Rard Willem De Leeuw, Paul Frank Luehrmann, Paul Jacques Van Wijnen, Kars Zeger Troost | 2008-07-22 |
| 7403264 | Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus | Andre Bernardus Jeunink, M'hamed Akhssay, Johannes Jacobus Matheus Baselmans, Franciscus Antonius Chrysogonus Marie Commissaris, Simon De Groot +3 more | 2008-07-22 |
| 7262831 | Lithographic projection apparatus and device manufacturing method using such lithographic projection apparatus | M'hamed Akhssay, Johannes Jacobus Matheus Baselmans, Franciscus Antonius Chrysogonus Marie Commissaris, Simon De Groot, Andre Bernardus Jeunink +2 more | 2007-08-28 |
| 7259829 | Lithographic apparatus and device manufacturing method | Arno Jan Bleeker | 2007-08-21 |
| 6927835 | Adaptive thermal control of lithographic chemical processes | Cassandra Owen, Stephan Ewald Sinkwitz | 2005-08-09 |
| 6873938 | Adaptive lithographic critical dimension enhancement | Theodore Paxton, Todd Hiar, Todd Davis | 2005-03-29 |