Issued Patents All Time
Showing 26–50 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10996570 | Metrology method, patterning device, apparatus and computer program | Zili Zhou, Nitesh Pandey, Olger Victor Zwier, Patrick Warnaar, Maurits Van Der Schaar +6 more | 2021-05-04 |
| 10908513 | Metrology method and apparatus and computer program | Marc Johannes Noot, Simon Gijsbert Josephus Mathijssen, Jinmoo Byun, Hyun-Su Kim, Won-Jae Jang +1 more | 2021-02-02 |
| 10901330 | Recipe selection based on inter-recipe consistency | Arie Jeffrey Den Boef, Timothy Dugan Davis, Peter David Engblom | 2021-01-26 |
| 10884342 | Method and apparatus for predicting performance of a metrology system | Martinus Gerardus Johannes Maria MAASSEN, Reinder Teun Plug | 2021-01-05 |
| 10866527 | Methods and apparatus for monitoring a lithographic manufacturing process | Emil Peter Schmitt-Weaver, Wim Tjibbo Tel, Frank Staals, Leon Martin Levasier | 2020-12-15 |
| 10845707 | Determination of stack difference and correction using stack difference | Arie Jeffrey Den Boef | 2020-11-24 |
| 10831109 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Martin Jacobus Johan Jak | 2020-11-10 |
| 10831111 | Metrology method and lithographic method, lithographic cell and computer program | — | 2020-11-10 |
| 10809628 | Method of designing metrology targets, substrates having metrology targets, method of measuring overlay, and device manufacturing method | Arie Jeffrey Den Boef | 2020-10-20 |
| 10718604 | Metrology method, target and substrate | Henricus Wilhelmus Maria Van Buel, Christophe David Fouquet, Hendrik Jan Hidde Smilde, Maurits Van Der Schaar, Arie Jeffrey Den Boef +7 more | 2020-07-21 |
| 10698322 | Metrology method, computer product and system | Arie Jeffrey Den Boef | 2020-06-30 |
| 10656533 | Metrology in lithographic processes | Simon Gijsbert Josephus Mathijssen, Martin Jacobus Johan Jak | 2020-05-19 |
| 10635004 | Correction using stack difference | Aiqin JIANG, Arie Jeffrey Den Boef, Hans Van Der Laan, Bart Visser, Martin Jacobus Johan Jak | 2020-04-28 |
| 10527949 | Metrology method, computer product and system | Arie Jeffrey Den Boef | 2020-01-07 |
| 10527953 | Metrology recipe selection | Arie Jeffrey Den Boef, Martin Jacobus Johan Jak | 2020-01-07 |
| 10481499 | Determination of stack difference and correction using stack difference | Arie Jeffrey Den Boef | 2019-11-19 |
| 10451978 | Metrology parameter determination and metrology recipe selection | Simon Gijsbert Josephus Mathijssen, Marc Johannes Noot, Arie Jeffrey Den Boef, Mohammadreza Hajiahmadi, Farzad Farhadzadeh | 2019-10-22 |
| 10394137 | Inspection method, lithographic apparatus, mask and substrate | Youri Johannes Laurentius Maria Van Dommelen, Peter David Engblom, Lambertus Gerardus Maria Kessels, Arie Jeffrey Den Boef, Paul Christiaan Hinnen +1 more | 2019-08-27 |
| 10386176 | Metrology method, target and substrate | Henricus Wilhelmus Maria Van Buel, Christophe David Fouquet, Hendrik Jan Hidde Smilde, Maurits Van Der Schaar, Arie Jeffrey Den Boef +7 more | 2019-08-20 |
| 10345709 | Determination of stack difference and correction using stack difference | Arie Jeffrey Den Boef | 2019-07-09 |
| 10338484 | Recipe selection based on inter-recipe consistency | Arie Jeffrey Den Boef, Timothy Dugan Davis, Peter David Engblom | 2019-07-02 |
| 10078268 | Determination of stack difference and correction using stack difference | Arie Jeffrey Den Boef | 2018-09-18 |
| 10025199 | Method of designing metrology targets, substrates having metrology targets, method of measuring overlay, and device manufacturing method | Arie Jeffrey Den Boef | 2018-07-17 |
| 10001711 | Inspection method, lithographic apparatus, mask and substrate | Youri Johannes Laurentius Maria Van Dommelen, Peter David Engblom, Lambertus Gerardus Maria Kessels, Arie Jeffrey Den Boef, Paul Christiaan Hinnen +1 more | 2018-06-19 |
| 9714827 | Metrology method and apparatus, lithographic system, device manufacturing method and substrate | Maurits Van Der Schaar, Hendrik Jan Hidde Smilde | 2017-07-25 |