Issued Patents All Time
Showing 51–57 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494872 | Inspection method for lithography | Arie Jeffrey Den Boef, Marcus Adrianus Van De Kerkhof, Maurits Van Der Schaar | 2016-11-15 |
| 9331022 | Substrate and patterning device for use in metrology, metrology method and device manufacturing method | Maurits Van Der Schaar, Patrick Warnaar, Hendrik Jan Hidde Smilde, Michael Kubis | 2016-05-03 |
| 9223227 | Inspection apparatus and method, lithographic apparatus, lithographic processing cell and device manufacturing method | Arie Jeffrey Den Boef, Stefan Carolus Jacobus Antonius Keij, Peter Clement Paul Vanoppen | 2015-12-29 |
| 9163935 | Device manufacturing method and associated lithographic apparatus, inspection apparatus, and lithographic processing cell | Arie Jeffrey Den Boef, Martin Jacobus Johan Jak, Michael Kubis | 2015-10-20 |
| 8908147 | Method and apparatus for determining an overlay error | Arie Jeffrey Den Boef, Maurits Van Der Schaar, Andreas Fuchs, Martyn John Coogans, Stephen Morgan +1 more | 2014-12-09 |
| 8709687 | Substrate and patterning device for use in metrology, metrology method and device manufacturing method | Maurits Van Der Schaar, Patrick Warnaar, Hendrik Jan Hidde Smilde, Michael Kubis | 2014-04-29 |
| 7457454 | Detailed grey scale inspection method and apparatus | — | 2008-11-25 |