Issued Patents All Time
Showing 76–100 of 123 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE37580 | Guard ring electrostatic chuck | John H. Keller, Joseph S. Logan, Robert E. Tompkins, Robert P. Westerfield, Jr. | 2002-03-12 |
| 6348725 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2002-02-19 |
| RE37541 | Electrostatic chuck with reference electrode | John H. Keller, Joseph S. Logan, Robert E. Tompkins, Robert P. Westerfield, Jr. | 2002-02-05 |
| 6303523 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2001-10-16 |
| 6280563 | Plasma device including a powered non-magnetic metal member between a plasma AC excitation source and the plasma | Scott Baldwin, John Holland | 2001-08-28 |
| 6277237 | Chamber liner for semiconductor process chambers | Alan M. Schoepp, William M. Denty, Jr. | 2001-08-21 |
| 6270862 | Method for high density plasma chemical vapor deposition of dielectric films | Brian McMillin, Huong Nguyen, Butch Berney | 2001-08-07 |
| 6203657 | Inductively coupled plasma downstream strip module | Wenli Collison, Tuqiang Ni, Butch Berney, Wayne Vereb, Brian McMillin | 2001-03-20 |
| 6170429 | Chamber liner for semiconductor process chambers | Alan M. Schoepp, William M. Denty, Jr. | 2001-01-09 |
| 6142163 | Method and apparatus for pressure control in vacuum processors | Brian McMillin, Farro Kaveh | 2000-11-07 |
| 6062729 | Rapid IR transmission thermometry for wafer temperature sensing | Tuqiang Ni | 2000-05-16 |
| 6042687 | Method and apparatus for improving etch and deposition uniformity in plasma semiconductor processing | Vikram Singh, Brian McMillin, Tom Ni, Richard Yang | 2000-03-28 |
| 6027603 | Inductively coupled planar source for substantially uniform plasma flux | John Holland | 2000-02-22 |
| 6013155 | Gas injection system for plasma processing | Brian McMillin, Huong Nguyen, Tom Ni | 2000-01-11 |
| 5982099 | Method of and apparatus for igniting a plasma in an r.f. plasma processor | Brett C. Richardson, Tuan Ngo, John Holland | 1999-11-09 |
| 5975013 | Vacuum plasma processor having coil with small magnetic field in its center | John Holland | 1999-11-02 |
| 5892198 | Method of and apparatus for electronically controlling r.f. energy supplied to a vacuum plasma processor and memory for same | John Holland | 1999-04-06 |
| 5847918 | Electrostatic clamping method and apparatus for dielectric workpieces in vacuum processors | Paul Shufflebotham | 1998-12-08 |
| 5838529 | Low voltage electrostatic clamp for substrates such as dielectric substrates | Paul Shufflebotham | 1998-11-17 |
| 5835334 | Variable high temperature chuck for high density plasma chemical vapor deposition | Brian McMillin, Butch Berney, Huong Nguyen | 1998-11-10 |
| 5803107 | Method and apparatus for pressure control in vacuum processors | Farro Kaveh, Brett C. Richardson, Christopher H. Olson | 1998-09-08 |
| 5805408 | Electrostatic clamp with lip seal for clamping substrates | Robert A. Maraschin, Paul Shufflebotham | 1998-09-08 |
| 5800619 | Vacuum plasma processor having coil with minimum magnetic field in its center | John Holland | 1998-09-01 |
| 5793162 | Apparatus for controlling matching network of a vacuum plasma processor and memory for same | John Holland | 1998-08-11 |
| 5759280 | Inductively coupled source for deriving substantially uniform plasma flux | John Holland | 1998-06-02 |