Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6754062 | Hybrid ceramic electrostatic clamp | Joseph S. Logan, John R. Miller, Mahmood Naim | 2004-06-22 |
| 6499987 | Positive control non-return valve for an injection molding machine | Michael F. Durina | 2002-12-31 |
| RE37580 | Guard ring electrostatic chuck | Michael Barnes, John H. Keller, Joseph S. Logan, Robert P. Westerfield, Jr. | 2002-03-12 |
| RE37541 | Electrostatic chuck with reference electrode | Michael Barnes, John H. Keller, Joseph S. Logan, Robert P. Westerfield, Jr. | 2002-02-05 |
| 6268994 | Electrostatic chuck and method of manufacture | Joseph S. Logan, John R. Miller | 2001-07-31 |
| 5925845 | Shoot-through cover for an explosively formed penetrator warhead | Erling M. Danielson | 1999-07-20 |
| 5905626 | Electrostatic chuck with ceramic pole protection | Joseph S. Logan | 1999-05-18 |
| 5901030 | Electrostatic chuck employing thermoelectric cooling | Joseph S. Logan | 1999-05-04 |
| 5612851 | Guard ring electrostatic chuck | Michael Barnes, John H. Keller, Joseph S. Logan, Robert P. Westerfield, Jr. | 1997-03-18 |
| 5561585 | Electrostatic chuck with reference electrode | Michael Barnes, John H. Keller, Joseph S. Logan, Robert P. Westerfield, Jr. | 1996-10-01 |
| 5535507 | Method of making electrostatic chuck with oxide insulator | Michael Barnes, John H. Keller, Joseph S. Logan, Raymond R. Ruckel, Robert P. Westerfield, Jr. | 1996-07-16 |
| 5521790 | Electrostatic chuck having relatively thick and thin areas and means for uniformly cooling said thick and thin areas during chuck anodization | Raymond R. Ruckel, Robert P. Westerfield, Jr. | 1996-05-28 |
| 5467249 | Electrostatic chuck with reference electrode | Michael Barnes, John H. Keller, Joseph S. Logan, Robert P. Westerfield, Jr. | 1995-11-14 |
| 5463525 | Guard ring electrostatic chuck | Michael Barnes, John H. Keller, Joseph S. Logan, Robert P. Westerfield, Jr. | 1995-10-31 |
| 5191506 | Ceramic electrostatic chuck | Joseph S. Logan, Raymond R. Ruckel, Robert P. Westerfield, Jr. | 1993-03-02 |
| 5155652 | Temperature cycling ceramic electrostatic chuck | Joseph S. Logan, Raymond R. Ruckel, Robert P. Westerfield, Jr. | 1992-10-13 |
| 5099571 | Method for fabricating a split-ring electrostatic chuck | Joseph S. Logan, Raymond R. Ruckel, Robert P. Westerfield, Jr. | 1992-03-31 |
| 5055964 | Electrostatic chuck having tapered electrodes | Joseph S. Logan, Raymond R. Ruckel, Robert P. Westerfield, Jr. | 1991-10-08 |
| 4845995 | Material tester | Robert P. Kaste | 1989-07-11 |