| 6754062 |
Hybrid ceramic electrostatic clamp |
Joseph S. Logan, John R. Miller, Mahmood Naim |
2004-06-22 |
$25,907,000 |
| 6499987 |
Positive control non-return valve for an injection molding machine |
Michael F. Durina |
2002-12-31 |
|
| RE37580 |
Guard ring electrostatic chuck |
Michael Barnes, John H. Keller, Joseph S. Logan, Robert P. Westerfield, Jr. |
2002-03-12 |
|
| RE37541 |
Electrostatic chuck with reference electrode |
Michael Barnes, John H. Keller, Joseph S. Logan, Robert P. Westerfield, Jr. |
2002-02-05 |
|
| 6268994 |
Electrostatic chuck and method of manufacture |
Joseph S. Logan, John R. Miller |
2001-07-31 |
|
| 5925845 |
Shoot-through cover for an explosively formed penetrator warhead |
Erling M. Danielson |
1999-07-20 |
$5,700,000 |
| 5905626 |
Electrostatic chuck with ceramic pole protection |
Joseph S. Logan |
1999-05-18 |
|
| 5901030 |
Electrostatic chuck employing thermoelectric cooling |
Joseph S. Logan |
1999-05-04 |
|
| 5612851 |
Guard ring electrostatic chuck |
Michael Barnes, John H. Keller, Joseph S. Logan, Robert P. Westerfield, Jr. |
1997-03-18 |
$9,376,000 |
| 5561585 |
Electrostatic chuck with reference electrode |
Michael Barnes, John H. Keller, Joseph S. Logan, Robert P. Westerfield, Jr. |
1996-10-01 |
$9,792,000 |
| 5535507 |
Method of making electrostatic chuck with oxide insulator |
Michael Barnes, John H. Keller, Joseph S. Logan, Raymond R. Ruckel, Robert P. Westerfield, Jr. |
1996-07-16 |
$6,072,000 |
| 5521790 |
Electrostatic chuck having relatively thick and thin areas and means for uniformly cooling said thick and thin areas during chuck anodization |
Raymond R. Ruckel, Robert P. Westerfield, Jr. |
1996-05-28 |
$12,387,000 |
| 5467249 |
Electrostatic chuck with reference electrode |
Michael Barnes, John H. Keller, Joseph S. Logan, Robert P. Westerfield, Jr. |
1995-11-14 |
$11,832,000 |
| 5463525 |
Guard ring electrostatic chuck |
Michael Barnes, John H. Keller, Joseph S. Logan, Robert P. Westerfield, Jr. |
1995-10-31 |
$8,032,000 |
| 5191506 |
Ceramic electrostatic chuck |
Joseph S. Logan, Raymond R. Ruckel, Robert P. Westerfield, Jr. |
1993-03-02 |
$8,547,000 |
| 5155652 |
Temperature cycling ceramic electrostatic chuck |
Joseph S. Logan, Raymond R. Ruckel, Robert P. Westerfield, Jr. |
1992-10-13 |
$5,658,000 |
| 5099571 |
Method for fabricating a split-ring electrostatic chuck |
Joseph S. Logan, Raymond R. Ruckel, Robert P. Westerfield, Jr. |
1992-03-31 |
$11,685,000 |
| 5055964 |
Electrostatic chuck having tapered electrodes |
Joseph S. Logan, Raymond R. Ruckel, Robert P. Westerfield, Jr. |
1991-10-08 |
$19,888,000 |
| 4845995 |
Material tester |
Robert P. Kaste |
1989-07-11 |
|
