Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5535507 | Method of making electrostatic chuck with oxide insulator | Michael Barnes, John H. Keller, Joseph S. Logan, Robert E. Tompkins, Robert P. Westerfield, Jr. | 1996-07-16 |
| 5521790 | Electrostatic chuck having relatively thick and thin areas and means for uniformly cooling said thick and thin areas during chuck anodization | Robert E. Tompkins, Robert P. Westerfield, Jr. | 1996-05-28 |
| 5191506 | Ceramic electrostatic chuck | Joseph S. Logan, Robert E. Tompkins, Robert P. Westerfield, Jr. | 1993-03-02 |
| 5154333 | Jaw cleaving device | Tibor L. Bauer, William A. Cavaliere, David C. Linnell | 1992-10-13 |
| 5155652 | Temperature cycling ceramic electrostatic chuck | Joseph S. Logan, Robert E. Tompkins, Robert P. Westerfield, Jr. | 1992-10-13 |
| 5099571 | Method for fabricating a split-ring electrostatic chuck | Joseph S. Logan, Robert E. Tompkins, Robert P. Westerfield, Jr. | 1992-03-31 |
| 5055964 | Electrostatic chuck having tapered electrodes | Joseph S. Logan, Robert E. Tompkins, Robert P. Westerfield, Jr. | 1991-10-08 |
| 4869876 | Multi-purpose plural-oven gas chromatography system with shared controls | Kenneth D. Arfman, Theodore J. Pillera, II, Allan C. Turits, John Quillian Walker, II | 1989-09-26 |
| 4476734 | Wet needle sampler for use with a gas chromatograph | Thomas M Banks, Samuel F. Spencer, John Quillian Walker, II | 1984-10-16 |