Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10388492 | Coated semiconductor processing members having chlorine and fluorine plasma erosion resistance and complex oxide coatings therefor | David Hammerich | 2019-08-20 |
| 9790581 | Emissivity controlled coatings for semiconductor chamber components | David Hammerich | 2017-10-17 |
| 9543183 | Heated electrostatic chuck and semiconductor wafer heater and methods for manufacturing same | Jae Yong Cho, Kevin Argabright, James E. LaRoche, III, David Hammerich, John R. Miller | 2017-01-10 |
| 7667944 | Polyceramic e-chuck | — | 2010-02-23 |
| 6754062 | Hybrid ceramic electrostatic clamp | Joseph S. Logan, John R. Miller, Robert E. Tompkins | 2004-06-22 |