Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10388492 | Coated semiconductor processing members having chlorine and fluorine plasma erosion resistance and complex oxide coatings therefor | Mahmood Naim | 2019-08-20 |
| 9790581 | Emissivity controlled coatings for semiconductor chamber components | Mahmood Naim | 2017-10-17 |
| 9543183 | Heated electrostatic chuck and semiconductor wafer heater and methods for manufacturing same | Jae Yong Cho, Kevin Argabright, James E. LaRoche, III, Mahmood Naim, John R. Miller | 2017-01-10 |