Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9543183 | Heated electrostatic chuck and semiconductor wafer heater and methods for manufacturing same | Jae Yong Cho, Kevin Argabright, Mahmood Naim, David Hammerich, John R. Miller | 2017-01-10 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9543183 | Heated electrostatic chuck and semiconductor wafer heater and methods for manufacturing same | Jae Yong Cho, Kevin Argabright, Mahmood Naim, David Hammerich, John R. Miller | 2017-01-10 |