Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of making electrostatic chuck with oxide insulator

Method of making electrostatic chuck with oxide insulator

US Patent 5535507 · Granted Jul 16, 1996

Estimated economic value: $6,072,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Cutting tool for band clamp2025
System and method to support in-order message processing with reactive microserv2025
Drive-through order point2020
Advances in watercraft hull lift, efficiency, and reduced hump drag with increas2020
Digital display mounting and lift bracket2018
Mobile wireless order point and pick-up station2018
Display enclosure with passive cooling system2018
Plasma source for a focused ion beam system2017
Apparatus and methods for transporting and processing substrates2016
Manual switch system for outputting multimedia content to a digital sign2016
Switch system for outputting multimedia content to a digital sign2016
Watercraft hull with improved lift, planing speed range, and near maximum effici2016