Issued Patents All Time
Showing 176–200 of 241 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9377692 | Electric/magnetic field guided acid diffusion | Peng Xie, Tristan Y. Ma, Joseph C. Olson, Christopher Dennis Bencher | 2016-06-28 |
| 9379021 | Method to reduce K value of dielectric layer for advanced FinFET formation | Ellie Yieh, Srinivas D. Nemani | 2016-06-28 |
| 9366966 | Electric/magnetic field guided acid profile control in a photoresist layer | Peng Xie | 2016-06-14 |
| 9340877 | Method and system for modifying photoresist using electromagnetic radiation and ion implantation | Patrick M. Martin | 2016-05-17 |
| 9336998 | Apparatus and method for dynamic control of ion beam energy and angle | Daniel Distaso, Nini Munoz, Tristan Y. Ma, Yu-Kang Liu | 2016-05-10 |
| 9293301 | In situ control of ion angular distribution in a processing apparatus | Costel Biloiu, Nini Munoz, Anthony Renau | 2016-03-22 |
| 9288889 | Apparatus and techniques for energetic neutral beam processing | Svetlana B. Radovanov, Bon-Woong Koo, Peter F. Kurunczi | 2016-03-15 |
| 9280070 | Field guided exposure and post-exposure bake process | Peng Xie | 2016-03-08 |
| 9268228 | Techniques for patterning a substrate | Tristan Y. Ma | 2016-02-23 |
| 9253868 | Neutral beam source with plasma sheath-shaping neutralization grid | Sang Ki Nam | 2016-02-02 |
| 9240350 | Techniques for forming 3D structures | Christopher R. Hatem, George D. Papasouliotis | 2016-01-19 |
| 9236257 | Techniques to mitigate straggle damage to sensitive structures | Christopher R. Hatem, Anthony Renau, John Hautala | 2016-01-12 |
| 9232628 | Method and system for plasma-assisted ion beam processing | Svetlana B. Radovanov, Bon-Woong Koo | 2016-01-05 |
| 9214377 | Methods for silicon recess structures in a substrate by utilizing a doping layer | Ying Zhang, Hua Chung, Srinivas D. Nemani | 2015-12-15 |
| 9190498 | Technique for forming a FinFET device using selective ion implantation | Adam Brand, Srinivas D. Nemani, John Hautala, Yuri Erokhin | 2015-11-17 |
| 9136096 | Three dimensional metal deposition technique | Adjin Sarajlic | 2015-09-15 |
| 9123509 | Techniques for plasma processing a substrate | George D. Papasouliotis, Kamal Hadidi, Helen L. Maynard, Vikram Singh, Timothy J. Miller +1 more | 2015-09-01 |
| 9118001 | Techniques for treating sidewalls of patterned structures using angled ion treatment | Daniel Distaso, John Hautala, Christopher Campbell | 2015-08-25 |
| 9062367 | Plasma processing of workpieces to form a coating | Christopher R. Hatem, Louis Steen, Deepak A. Ramappa | 2015-06-23 |
| 9024282 | Techniques and apparatus for high rate hydrogen implantation and co-implantion | Svetlana B. Radovanov, Anthony Renau, Xianfeng Lu | 2015-05-05 |
| 9024273 | Method to generate molecular ions from ions with a smaller atomic mass | Svetlana B. Radovanov, Christopher R. Hatem | 2015-05-05 |
| 8974683 | Method and system for modifying resist openings using multiple angled ions | Patrick M. Martin, Joseph C. Olson, Andrew J. Hornak | 2015-03-10 |
| 8969181 | Method for epitaxial layer overgrowth | Morgan Evans, Christopher R. Hatem | 2015-03-03 |
| 8952344 | Techniques for processing photoresist features using ions | Frank Sinclair, Patrick M. Martin, Armah Kpissay | 2015-02-10 |
| 8946061 | Engineering of porous coatings formed by ion-assisted direct deposition | Blake Darby, Xianfeng Lu | 2015-02-03 |