Issued Patents All Time
Showing 226–241 of 241 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8354655 | Method and system for controlling critical dimension and roughness in resist features | Christopher J. Leavitt, Joseph C. Olson, Patrick M. Martin | 2013-01-15 |
| 8288741 | Apparatus and method for three dimensional ion processing | Timothy J. Miller | 2012-10-16 |
| 8288255 | N-type doping of zinc telluride | Xianfeng Lu, Anthony Renau | 2012-10-16 |
| 8187979 | Workpiece patterning with plasma sheath modulation | Deepak A. Ramappa | 2012-05-29 |
| 8188445 | Ion source | Timothy J. Miller, Joseph C. Olson, Vikram Singh | 2012-05-29 |
| 8133804 | Method and system for modifying patterned photoresist using multi-step ion implantation | Joseph C. Olson, Patrick M. Martin | 2012-03-13 |
| 8124506 | USJ techniques with helium-treated substrates | Christopher R. Hatem | 2012-02-28 |
| 8101510 | Plasma processing apparatus | Timothy J. Miller, Svetlana B. Radovanov, Anthony Renau, Vikram Singh | 2012-01-24 |
| 8003498 | Particle beam assisted modification of thin film materials | Jonathan Gerald England, Frank Sinclair, John (Bon-Woong) Koo, Rajesh Dorai | 2011-08-23 |
| 7927986 | Ion implantation with heavy halogenide compounds | George D. Papasouliotis, Edwin Arevalo | 2011-04-19 |
| 7878145 | Monitoring plasma ion implantation systems for fault detection and process control | Ziwei Fang, Sung-Cheon Ko, Edmund J. Winder, Daniel Distaso, Bon-Woong Koo +1 more | 2011-02-01 |
| 7767977 | Ion source | Svetlana B. Radovanov, Timothy J. Miller | 2010-08-03 |
| 7687787 | Profile adjustment in plasma ion implanter | George D. Papasouliotis, Ziwei Fang, Richard Appel, Vincent Deno, Vikram Singh +1 more | 2010-03-30 |
| 7586100 | Closed loop control and process optimization in plasma doping processes using a time of flight ion detector | Deven M. Raj, Bernard G. Lindsay, Timothy J. Miller, George D. Papasouliotis | 2009-09-08 |
| 7476849 | Technique for monitoring and controlling a plasma process | Bon-Woong Koo, Vassilis Panayotis Vourloumis, Vikram Singh, Ziwei Fang | 2009-01-13 |
| 7453059 | Technique for monitoring and controlling a plasma process | Bon-Woong Koo, Ziwei Fang, Vikram Singh, Vassilis Panayotis Vourloumis, Bernard G. Lindsay | 2008-11-18 |