Issued Patents All Time
Showing 26–50 of 118 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11836913 | Film thickness estimation from machine learning based processing of substrate images | Sivakumar Dhandapani, Arash Alahgholipouromrani, Dominic J. Benvegnu, Kiran Shrestha | 2023-12-05 |
| 11838092 | Wireless communication apparatus and method | Kosuke Tanabe, Nader Zein, Christos Masouros | 2023-12-05 |
| 11791224 | Technique for training neural network for use in in-situ monitoring during polishing and polishing system | Kun Xu, Kiran Shrestha, Doyle E. Bennett, David Maxwell Gage, Benjamin Cherian +1 more | 2023-10-17 |
| 11780047 | Determination of substrate layer thickness with polishing pad wear compensation | Kun Xu, Benjamin Cherian, Kiran Shrestha | 2023-10-10 |
| 11699595 | Imaging for monitoring thickness in a substrate cleaning system | Dominic J. Benvegnu, Boguslaw A. Swedek, Thomas H. Osterheld | 2023-07-11 |
| 11670503 | Method of atomic layer deposition | Hu Kang, Adrien LaVoie, Seiji Matsuyama, Purushottam Kumar | 2023-06-06 |
| 11663914 | Geohash-based traffic management | Cheng Luo, Lan Cao, Shiwen He, Ke Zhang, Yuan Yuan Jia | 2023-05-30 |
| 11658078 | Using a trained neural network for use in in-situ monitoring during polishing and polishing system | Kun Xu, Kiran Shrestha, Doyle E. Bennett, David Maxwell Gage, Benjamin Cherian +1 more | 2023-05-23 |
| 11651207 | Training spectrum generation for machine learning system for spectrographic monitoring | Benjamin Cherian, Nicholas A. Wiswell, Thomas H. Osterheld | 2023-05-16 |
| 11646198 | Ultrathin atomic layer deposition film accuracy thickness control | Hu Kang, Adrien LaVoie, Seiji Matsuyama, Purushottam Kumar | 2023-05-09 |
| 11577356 | Machine vision as input to a CMP process control algorithm | Benjamin Cherian, Nicholas A. Wiswell, Dominic J. Benvegnu, Boguslaw A. Swedek, Thomas H. Osterheld | 2023-02-14 |
| 11524382 | Polishing apparatus using machine learning and compensation for pad thickness | Kun Xu, Denis Ivanov, Harry Q. Lee | 2022-12-13 |
| 11508859 | Method for forming doped epitaxial layer of contact image sensor | Chenchen Qiu, Chang Sun, Zhengying Wei | 2022-11-22 |
| 11507824 | Training spectrum generation for machine learning system for spectrographic monitoring | Benjamin Cherian, Nicholas A. Wiswell, Thomas H. Osterheld | 2022-11-22 |
| 11504821 | Predictive filter for polishing pad wear rate monitoring | Sivakumar Dhandapani | 2022-11-22 |
| 11479856 | Multi-cycle ALD process for film uniformity and thickness profile modulation | Purushottam Kumar, Adrien LaVoie, Hu Kang, Tuan Nguyen, Ye Wang | 2022-10-25 |
| 11449016 | Action control method and apparatus | Xinyu Wang, Chen Chen | 2022-09-20 |
| 11255017 | Systems and methods for flow monitoring in a precursor vapor supply system of a substrate processing system | Purushottam Kumar, Adrien LaVoie, You Zhai, Jeremiah Baldwin, Sung Je Kim | 2022-02-22 |
| 11180850 | Dynamic precursor dosing for atomic layer deposition | Purushottam Kumar, Adrien LaVoie, Hu Kang, Ishtak Karim, Fung Suong Ou | 2021-11-23 |
| 11133180 | Gapfill of variable aspect ratio features with a composite PEALD and PECVD method | Hu Kang, Shankar Swaminathan, Wanki Kim, Dennis M. Hausmann, Bart J. van Schravendijk +1 more | 2021-09-28 |
| 11127567 | Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity | Hu Kang, Adrien LaVoie, Shankar Swaminathan, Chloe Baldasseroni, Frank L. Pasquale +8 more | 2021-09-21 |
| 11119412 | Exposure equipment and exposure method | Sihong Zhai | 2021-09-14 |
| 11101129 | Ultrathin atomic layer deposition film accuracy thickness control | Hu Kang, Adrien LaVoie, Seiji Matsuyama, Purushottam Kumar | 2021-08-24 |
| 11011379 | Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors | Reza Arghavani, Samantha Tan, Bhadri N. Varadarajan, Adrien LaVoie, Ananda Banerji +1 more | 2021-05-18 |
| 10757248 | Identifying location of mobile phones in a vehicle | Xinlin Wang, Cheng Luo, Lan Cao, Cheng Cheng Dong | 2020-08-25 |