Issued Patents All Time
Showing 76–100 of 118 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9797042 | Single ALD cycle thickness control in multi-station substrate deposition systems | Romuald Nowak, Hu Kang, Adrien LaVoie | 2017-10-24 |
| 9793110 | Gapfill of variable aspect ratio features with a composite PEALD and PECVD method | Hu Kang, Shankar Swaminathan, Wanki Kim, Dennis M. Hausmann, Bart J. van Schravendijk +1 more | 2017-10-17 |
| 9793096 | Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity | Hu Kang, Adrien LaVoie, Shankar Swaminathan, Chloe Baldasseroni, Frank L. Pasquale +8 more | 2017-10-17 |
| 9745658 | Chamber undercoat preparation method for low temperature ALD films | Hu Kang, Adrien LaVoie | 2017-08-29 |
| 9624578 | Method for RF compensation in plasma assisted atomic layer deposition | Frank L. Pasquale, Adrien LaVoie, Chloe Baldasseroni, Hu Kang, Shankar Swaminathan +7 more | 2017-04-18 |
| 9617638 | Methods and apparatuses for showerhead backside parasitic plasma suppression in a secondary purge enabled ALD system | Adrien LaVoie, Hu Kang, Purushottam Kumar, Shankar Swaminathan, Frank L. Pasquale +1 more | 2017-04-11 |
| 9579767 | Automatic generation of reference spectra for optical monitoring of substrates | Harry Q. Lee | 2017-02-28 |
| 9565635 | Activating a mobile terminal from mobile network side | Wei Sun, Haitao Xu, Xiaoyan Zhang, Bing Zhu | 2017-02-07 |
| 9524923 | Semiconductor structure and method for manufacturing the same | Xiao Han, Ju Zhang | 2016-12-20 |
| 9425078 | Inhibitor plasma mediated atomic layer deposition for seamless feature fill | Wei Tang, Bart J. van Schravendijk, Hu Kang, Adrien LaVoie, Deenesh Padhi +1 more | 2016-08-23 |
| 9372116 | Automatic initiation of reference spectra library generation for optical monitoring | Jeffrey Drue David | 2016-06-21 |
| 9362186 | Polishing with eddy current feed meaurement prior to deposition of conductive layer | Tomohiko Kitajima, Jeffrey Drue David, Taketo Sekine, Garlen C. Leung, Sidney P. Huey | 2016-06-07 |
| 9289875 | Feed forward and feed-back techniques for in-situ process control | Jeffrey Drue David, Harry Q. Lee | 2016-03-22 |
| 9257274 | Gapfill of variable aspect ratio features with a composite PEALD and PECVD method | Hu Kang, Shankar Swaminathan, Wanki Kim, Dennis M. Hausmann, Bart J. van Schravendijk +1 more | 2016-02-09 |
| 9242337 | Dynamic residue clearing control with in-situ profile control (ISPC) | Sivakumar Dhandapani, Benjamin Cherian, Thomas H. Osterheld, Charles C. Garretson | 2016-01-26 |
| 9221147 | Endpointing with selective spectral monitoring | Sivakumar Dhandapani, Benjamin Cherian, Thomas H. Osterheld, Jeffrey Drue David, Gregory E. Menk +2 more | 2015-12-29 |
| 9170450 | Printed flexible display having grating | — | 2015-10-27 |
| 9148778 | Activating a mobile terminal from mobile network side | Wei Sun, Haitao Xu, Xiaoyan Zhang, Bing Zhu | 2015-09-29 |
| 9138860 | Closed-loop control for improved polishing pad profiles | Sivakumar Dhandapani, Christopher Cocca, Jason Garcheung Fung, Shou-Sung Chang, Charles C. Garretson +2 more | 2015-09-22 |
| 9128915 | System and method for utilizing multiple encodings to identify similar language characters | Sofiane Ouaguenouni | 2015-09-08 |
| 9063364 | Piezo-capacitive effect-based printed flexible touchscreen display | — | 2015-06-23 |
| 9056383 | Path for probe of spectrographic metrology system | Jeffrey Drue David, Benjamin Cherian, Dominic J. Benvegnu, Boguslaw A. Swedek, Thomas H. Osterheld +4 more | 2015-06-16 |
| 8992286 | Weighted regression of thickness maps from spectral data | Benjamin Cherian, Jeffrey Drue David, Boguslaw A. Swedek, Dominic J. Benvegnu, Thomas H. Osterheld | 2015-03-31 |
| 8954186 | Selecting reference libraries for monitoring of multiple zones on a substrate | Boguslaw A. Swedek, Harry Q. Lee, Jeffrey Drue David, Sivakumar Dhandapani, Thomas H. Osterheld | 2015-02-10 |
| 8755927 | Feedback for polishing rate correction in chemical mechanical polishing | Charles C. Garretson, Sivakumar Dhandapani, Jeffrey Drue David, Harry Q. Lee | 2014-06-17 |