Issued Patents All Time
Showing 51–75 of 169 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7648584 | Method and apparatus for removing contamination from substrate | Erik M. Freer, John M. de Larios, Katrina Mikhaylichenko, Michael Ravkin, Mikhail Korolik +2 more | 2010-01-19 |
| 7645364 | Apparatus and method for plating semiconductor wafers | Yezdi Dordi, John M. Boyd, Robert A. Maraschin, Carl Woods | 2010-01-12 |
| 7604011 | Method and apparatus for semiconductor wafer cleaning using high-frequency acoustic energy with supercritical fluid | John M. Boyd, John Parks | 2009-10-20 |
| 7596886 | Method and system to separate and recycle divergent chemistries | John M. Boyd | 2009-10-06 |
| 7591613 | Method and apparatus for transporting a substrate using non-newtonian fluid | John M. de Larios, Mike Ravkin, John Parks, Mikhail Korolik | 2009-09-22 |
| 7582565 | Method and apparatus for semiconductor wafer planarization | John M. Boyd, Yezdi Dordi, William Thie, Bob Maraschin | 2009-09-01 |
| 7563348 | Electroplating head and method for operating the same | Yezdi Dordi, Bob Maraschin, John M. Boyd | 2009-07-21 |
| 7542134 | System, method and apparatus for in-situ substrate inspection | Aleksander Owczarz, Jaroslaw W. Winniczek, Luai Nasser, Alan M. Schoepp, Erik A. Edelberg | 2009-06-02 |
| 7503983 | Methods of proximity head brushing | John M. Boyd, Michael L. Orbock | 2009-03-17 |
| 7497767 | Vibration damping during chemical mechanical polishing | Hung Chih Chen, Shijian Li, John M. White, Ramin Emami, Steven M. Zuniga +1 more | 2009-03-03 |
| 7464719 | Multi-menisci processing apparatus | James P. Garcia, Mike Ravkin, Carl Woods, John M. de Larios | 2008-12-16 |
| 7416370 | Method and apparatus for transporting a substrate using non-Newtonian fluid | John M. de Larios, Mike Ravkin, John Parks, Mikhail Korolik | 2008-08-26 |
| 7413627 | Deposition chamber and method for depositing low dielectric constant films | Shijian Li, Yaxin Wang, Tetsuya Ishikawa, Alan W. Collins | 2008-08-19 |
| 7395611 | System processing a substrate using dynamic liquid meniscus | James P. Garcia, John M. de Larios, Michael Ravkin, Carl Woods | 2008-07-08 |
| 7397555 | System, method and apparatus for in-situ substrate inspection | Aleksander Owczarz, Jaroslaw W. Winniczek, Luai Nasser, Alan M. Schoepp, Erik A. Edelberg | 2008-07-08 |
| 7368017 | Method and apparatus for semiconductor wafer planarization | John M. Boyd, Yezdi Dordi, William Thie, Bob Maraschin | 2008-05-06 |
| 7367345 | Apparatus and method for providing a confined liquid for immersion lithography | David Hemker, John M. Boyd, John M. de Larios, Michael Ravkin, Mikhail Korolik | 2008-05-06 |
| 7358186 | Method and apparatus for material deposition in semiconductor fabrication | Yezdi Dordi, John M. Boyd, William Thie, Bob Maraschin, Joel M. Cook | 2008-04-15 |
| 7353560 | Proximity brush unit apparatus and method | John M. Boyd, Michael L. Orbock | 2008-04-08 |
| 7350315 | Edge wheel dry manifold | Glenn W. Davis, Carl Woods, John Parks, Mike Ravkin, Michael L. Orbock | 2008-04-01 |
| 7331847 | Vibration damping in chemical mechanical polishing system | Hung Chih Chen, John M. White, Shijian Li, Ramin Emami | 2008-02-19 |
| 7264007 | Method and apparatus for cleaning a substrate using megasonic power | John M. Boyd, Mike Ravkin, John M. de Larios | 2007-09-04 |
| 7252736 | Compliant grinding wheel | John M. Boyd, Yezdi Dordi | 2007-08-07 |
| 7252097 | System and method for integrating in-situ metrology within a wafer process | John M. Boyd, John M. de Larios, Michael Ravkin | 2007-08-07 |
| 7232761 | Method of chemical mechanical polishing with high throughput and low dishing | Shijian Li, Jui-Lung Li, Shi-Ping Wang, Gary Lam, David H. Mai | 2007-06-19 |