Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12023779 | Post-chemical mechanical polishing brush cleaning box | — | 2024-07-02 |
| 11132602 | Efficient online training for machine learning | Zhiyong Xie, Yue Lu, Pengjun Pei, Shuanghong Yang, Yong Wang +9 more | 2021-09-28 |
| 9005999 | Temperature control of chemical mechanical polishing | Kun Xu, Jimin Zhang, David H. Mai, Stephen Jew, Shih-Haur Shen +4 more | 2015-04-14 |
| 8930013 | Adaptively tracking spectrum features for endpoint detection | Jeffrey Drue David, Harry Q. Lee, Thian Choi Lim | 2015-01-06 |
| 7232761 | Method of chemical mechanical polishing with high throughput and low dishing | Shijian Li, Jui-Lung Li, Shi-Ping Wang, David H. Mai, Fred C. Redeker | 2007-06-19 |
| 6960521 | Method and apparatus for polishing metal and dielectric substrates | Yongsik Moon, David H. Mai, Kapila Wijekoon, Rajeev Bajaj, Rahul Surana +6 more | 2005-11-01 |
| 6790768 | Methods and apparatus for polishing substrates comprising conductive and dielectric materials with reduced topographical defects | Yongsik Moon, David H. Mai, Kapila Wijekoon, Rajeev Bajaj, Rahul Surana +6 more | 2004-09-14 |
| 6780773 | Method of chemical mechanical polishing with high throughput and low dishing | Shijian Li, Jui-Lung Li, Shi-Ping Wang, David H. Mai, Fred C. Redeker | 2004-08-24 |