Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11145504 | Method of forming film stacks with reduced defects | Zhijun Jiang, Ganesh Balasubramanian, Arkajit Roy Barman, Hidehiro Kojiri, Xinhai Han +8 more | 2021-10-12 |
| 8930013 | Adaptively tracking spectrum features for endpoint detection | Jeffrey Drue David, Harry Q. Lee, Gary Lam | 2015-01-06 |