Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11145492 | Local dry etching apparatus | — | 2021-10-12 |
| 6129776 | Operation method of vertical furnace | Masaaki Naito, Norimitsu Konno, Yasuhiko Fujiwara, Kyoichi Araki, Teruhiko Kokubun +1 more | 2000-10-10 |