Issued Patents All Time
Showing 51–75 of 178 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10570506 | Method to improve film quality for PVD carbon with reactive gas and bias power | Bhargav S. Citla, Jingjing Liu, Zhong Qiang Hua, Chentsau Ying, Srinivas D. Nemani | 2020-02-25 |
| 10566188 | Method to improve film stability | Maximillian Clemons, Michel R. Frei, Mahendra Pakala, Mehul Naik, Srinivas D. Nemani | 2020-02-18 |
| 10566226 | Multi-cassette carrying case | Sriskantharajah Thirunavukarasu, Eng Sheng Peh, Srinivas D. Nemani, Arvind Sundarrajan, Avinash Avula +2 more | 2020-02-18 |
| 10475655 | Selective deposition of metal silicides | Raymond Hung, Namsung Kim, Srinivas D. Nemani, Jong Hun Choi, Christopher Ahles +1 more | 2019-11-12 |
| 10429747 | Hybrid laser and implant treatment for overlay error correction | Mangesh Ashok BANGAR, Srinivas D. Nemani, Steve Ghanayem | 2019-10-01 |
| 10347516 | Substrate transfer chamber | Sriskantharajah Thirunavukarasu, Eng Sheng Peh, Srinivas D. Nemani, Arvind Sundarrajan, Avinash Avula | 2019-07-09 |
| 10297441 | Low-temperature atomic layer deposition of boron nitride and BN structures | Steven Wolf, Mary Edmonds, Andrew C. Kummel, Srinivas D. Nemani | 2019-05-21 |
| 10269571 | Methods for fabricating nanowire for semiconductor applications | Keith Tatseun Wong, Shiyu Sun, Sean S. Kang, Nam Sung Kim, Srinivas D. Nemani | 2019-04-23 |
| 10240232 | Gas control in process chamber | Qiwei Liang, Srinivas D. Nemani | 2019-03-26 |
| 10153187 | Methods and apparatus for transferring a substrate | Sriskantharajah Thirunavukarasu, Eng Sheng Peh, Srinivas D. Nemani, Arvind Sundarrajan, Avinash Avula | 2018-12-11 |
| 10128337 | Methods for forming fin structures with desired profile for 3D structure semiconductor applications | Jie Zhou, Zhong Qiang Hua, Chentsau Chris Ying, Srinivas D. Nemani | 2018-11-13 |
| 10096512 | Gapfill film modification for advanced CMP and recess flow | Erica Chen, Ludovic Godet, Srinivas D. Nemani | 2018-10-09 |
| 10096496 | Process chamber for etching low K and other dielectric films | Dmitry Lubomirsky, Srinivas D. Nemani, Sergey G. Belostotskiy | 2018-10-09 |
| 10049927 | Seam-healing method upon supra-atmospheric process in diffusion promoting ambient | Bencherki Mebarki, Sean S. Kang, Keith Tatseun Wong, He Ren, Mehul Naik +1 more | 2018-08-14 |
| 9911594 | Selective atomic layer deposition process utilizing patterned self assembled monolayers for 3D structure semiconductor applications | Srinivas D. Nemani, Ludovic Godet, Yin Fan | 2018-03-06 |
| 9865466 | Silicide phase control by confinement | Bencherki Mebarki, Mehul Naik, Srinivas D. Nemani | 2018-01-09 |
| 9852916 | Single platform, multiple cycle spacer deposition and etch | Hao Chen, Chentsau Ying, Srinivas D. Nemani | 2017-12-26 |
| 9815091 | Roll to roll wafer backside particle and contamination removal | Christopher S. Ngai, Huixiong Dai, Ludovic Godet | 2017-11-14 |
| 9777378 | Advanced process flow for high quality FCVD films | Srinivas D. Nemani, Erica Chen, Ludovic Godet, Jun Xue | 2017-10-03 |
| 9773675 | 3D material modification for advanced processing | Ludovic Godet, Srinivas D. Nemani, Erica Chen, Jun Xue, Gary E. Dickerson | 2017-09-26 |
| 9754791 | Selective deposition utilizing masks and directional plasma treatment | Ludovic Godet, Yin Fan, Srinivas D. Nemani | 2017-09-05 |
| 9748148 | Localized stress modulation for overlay and EPE | Huixiong Dai, Srinivas D. Nemani, Ludovic Godet, Christopher Dennis Bencher | 2017-08-29 |
| 9666414 | Process chamber for etching low k and other dielectric films | Dmitry Lubomirsky, Srinivas D. Nemani, Sergey G. Belostotskiy | 2017-05-30 |
| 9620407 | 3D material modification for advanced processing | Ludovic Godet, Srinivas D. Nemani, Erica Chen, Jun Xue, Gary E. Dickerson | 2017-04-11 |
| 9595467 | Air gap formation in interconnection structure by implantation process | Jun Xue, Ludovic Godet, Erica Chen, Srinivas D. Nemani | 2017-03-14 |